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Device and method for improving precision and sensitivity of fluorescent fiber temperature measurement

A fluorescent optical fiber and sensitivity technology, which is used in measuring devices, thermometers, thermometers with physical/chemical changes, etc. The effect of improving calculation speed and stability

Pending Publication Date: 2022-08-09
西安和其光电科技股份有限公司
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  • Application Information

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Problems solved by technology

[0004] However, in the temperature measurement of the existing lithography machine, the temperature measurement accuracy and sensitivity are high. The temperature measurement accuracy of the traditional fluorescent optical fiber temperature sensor is ±1℃, and the sensitivity of 1Hz can no longer meet the requirements.

Method used

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  • Device and method for improving precision and sensitivity of fluorescent fiber temperature measurement
  • Device and method for improving precision and sensitivity of fluorescent fiber temperature measurement
  • Device and method for improving precision and sensitivity of fluorescent fiber temperature measurement

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Embodiment

[0037] In this embodiment, the hardware circuit mainly reduces the noise of the circuit, and changes the circuit performance by adjusting the circuit parameters. figure 1 The analytical model circuit of the photodiode amplifier is given. figure 1In the model shown, it includes: photodiode ip, resistor RD, feedback resistor Rf, capacitor CD, Cin, Cs, amplifier input current noise Ei, amplifier input voltage noise Eu, feedback resistor noise Er, and operational amplifier.

[0038] The feedback resistance noise Er, the amplifier input current noise Ei, and the amplifier input voltage noise Eu constitute the output noise, namely Er+Ei+Eu. The output signal of the amplifier is the output signal ip*R f and the superposition of noise Er+Ei+Eu (three-part noise), namely

[0039] U0=ip*R f +(Er+Ei+Eu) (1)

[0040] Noise Ei and Eu are the characteristics of the operational amplifier. Once the operational amplifier is selected, the noise Ei and Eu are unchanged. Only the noise of th...

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Abstract

The invention belongs to the technical field of temperature sensors, and relates to a device and method for improving precision and sensitivity of fluorescent fiber temperature measurement, and the device comprises a noise reduction circuit which comprises a photodiode ip, a resistor RD, a feedback resistor Rf, capacitors CD, Cin and Cs, an amplifier input current noise Ei, an amplifier input voltage noise Eu, a feedback resistance noise Er, and an operational amplifier. Therefore, the temperature measurement precision is improved to + / -0.15 DEG C from the original + / -1 DEG C; according to the method, data collected on a fluorescence decay curve is subjected to segmented processing, the number of natural logarithms and the number of least square methods are greatly reduced, the refresh rate of temperature measurement data is increased, meanwhile, in order to increase the calculation speed, the temperature measurement sensitivity reaches 30 Hz, and therefore the method has higher measurement precision and better measurement sensitivity.

Description

technical field [0001] The invention belongs to the technical field of temperature sensors, and relates to a device and method for improving the accuracy and sensitivity of fluorescent optical fiber temperature measurement. Background technique [0002] The core technology of fluorescent optical fiber temperature sensor lies in its fluorescent substance and corresponding simulation algorithm. The technical principle and product structure are very simple. The temperature measuring phosphor is calcined at a high temperature of 1200 degrees. It has extremely long life and stable and reliable working characteristics. It is very suitable for large-scale industrial mass production, so as to quickly realize a wide range of industrial fields. application. The fluorescent optical fiber temperature sensor is composed of a multimode optical fiber and a fluorescent object (membrane) installed on top of it. After the fluorescent substance is excited by light of a certain wavelength (st...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K11/32
CPCG01K11/32
Inventor 马军刚邵飞刘帆李跟兴
Owner 西安和其光电科技股份有限公司
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