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Method for removing or reducing surface granules in oxide film and special-purpose polishing rod

A technology of oxide thin films and surface particles, which is applied in the usage of superconductor elements, the manufacture/processing of superconductor devices, and the manufacture of cables/conductors. Simple, low cost, and the effect of maintaining the performance of thin film samples

Inactive Publication Date: 2005-11-09
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the deposition rate of this method is slow, and the evaporation rate of each element is different, which easily causes the composition of the film to deviate.

Method used

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  • Method for removing or reducing surface granules in oxide film and special-purpose polishing rod
  • Method for removing or reducing surface granules in oxide film and special-purpose polishing rod
  • Method for removing or reducing surface granules in oxide film and special-purpose polishing rod

Examples

Experimental program
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Effect test

Embodiment 1

[0028] according to figure 1 Make a special polishing rod of the present invention, this polishing rod comprises a polishing rod handle 1 made of wood, a polishing rod base 2 made of rubber, the polishing surface of its polishing rod base 2 is smooth and smooth, and the polishing rod base 2 is fixed on The end of the handle 1 of the polishing rod, the base 2 is vertically fixed on the end of the handle 1, and the bottom surface of the base 2 is a polishing surface.

Embodiment 2

[0030] according to figure 1 Make a special polishing rod of the present invention, this polishing rod comprises a polishing rod handle 1 made of plastics, a polishing rod base 2 made of polytetrafluoroethylene, the polishing surface 5 of its polishing rod base 2 is smooth and smooth, and the polishing rod The base 2 is fixed on the end of the handle 1 of the polishing rod.

Embodiment 3

[0032] Put a piece of 3mm×10mm YBa 2 Cu 3 o 7-δ Large particle elimination in high temperature superconducting thin films.

[0033] What used in this embodiment is a piece of YBa prepared by pulsed laser deposition method of 3mm × 10mm 2 Cu 3 o 7-δ The high temperature superconducting thin film sample is the substrate 3 . The surface of the sample is rough and the particles are as large as image 3 shown. In the first step, the film sample was ultrasonically cleaned with alcohol for 10 minutes to ensure the surface of the film sample was clean. The second step is to ultrasonically clean the polishing rod with acetone for 10 minutes, and then ultrasonically clean it with alcohol for 10 minutes. The third step is to vertically press the polishing surface of the base of the polishing rod on the surface of the film substrate 3 to ensure that the polishing surface of the base of the polishing rod is in close and uniform contact with the surface of the film, and then quickly ...

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Abstract

The invention relates to a process for removing or reducing surface particles in oxide films and special-purpose polishing rod, wherein the method comprises, proceeding ultrasonic cleaning to the thin film sample, acetone and ethyl alcohol for the polishing rod, then pressing the polishing rod vertically on the thin film surface, thus assuring tight and uniform contact between the polishing rod and the thin film surface, then moving the rod quickly thus eliminating the particles, finally performing annealing treatment to the protective finished thin film. The advantages of the invention are simple process, better repeatability and low fabrication cost.

Description

technical field [0001] The invention relates to the field of preparation of oxide thin films, especially high-temperature superconducting thin films, in particular to the removal or reduction of yttrium barium copper oxide YBa by using polishing technology. 2 Cu 3 o 7-δ A method for preparing high temperature superconducting thin film particles. Background technique [0002] Oxide films, especially yttrium barium copper oxide YBa 2 Cu 3 o 7-δ High-temperature superconducting thin films (hereinafter referred to as YBCO), due to their high superconducting transition temperature and high critical current density, are widely used in the field of microwave and communication, especially in microwave devices such as filters. irreplaceable position. Now prepare YBa 2 Cu 3 o 7-δ Commonly used methods for thin films are pulsed laser deposition and magnetron sputtering. YBa with excellent properties can be prepared by pulsed laser deposition 2 Cu 3 o 7-δ The advantages of ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/00H01B12/06H01B13/00H10N60/01
CPCY02E40/642Y02E40/60
Inventor 何萌周岳亮谈国太陈正豪吕惠宾杨国桢
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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