Apparatus for generating low temperature plasma at atmospheric pressure

A low-temperature plasma and atmospheric pressure technology, applied in the direction of plasma, chemical/physical/physicochemical processes of energy application, electrical components, etc., can solve problems such as expensive, difficult power supply operation and control, and high power consumption
CN1491527AInactive Publication Date: 2004-04-21SE PLASMA
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
SE PLASMA
Publication Date
2004-04-21
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

Disclosed is an apparatus for generating low-temperature plasma at atmospheric pressure, comprising: a couple of electrodes facing each other at a distance, one of them being connected to a power supply, the other being grounded; a couple of dielectrics with a thickness of 25 mum to 10 mm, positioned on the facing surfaces of the electrodes in such away as to face each other, one of them having at least one discharge gap therein; and a conductor electrode having at least one tip positioned within the discharge gap, wherein an electric field is applied at an intensity of 1-100 KV / cm through the power supply across the electrodes by use of a pulse direct current or an alternating current in a frequency bandwidth of 50 Hz to 10 GHz while a reaction gas is fed between the electrodes, so as to induce a hollow cathode discharge, a capillary discharge or the high accumulation of charges from the discharge gap. The inventive apparatus prevents the conversion of the plasma to arcs and thus gives stable, low-temperature plasma in a high density.
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Description

technical field

[0001] The present invention relates to a device for generating high-density low-temperature plasma at atmospheric pressure with low discharge initiation and maintenance voltages. Background technique

[0002] In general, a plasma is defined as a partially ionized gas consisting of approximately equal amounts of positive and negative free charges, so it is electrically neutral. Depending on the temperature at which ionization is performed, plasmas are divided into high-temperature plasmas and low-temperature plasma subgroups, and plasmas are chemically and physically highly reactive.

[0003] Low-temperature plasma is used to synthesize various materials such as metals, semiconductors, polymers, nylon, plastics, paper, fibers, and ozone, or to modify the surface properties of materials while improving various physical and chemical properties such as connection strength, dyeing properties , printability, etc. Therefore, low-temperature plasma has multiple us...

Claims

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