Simplified fly eye type light beam homogenizer

Abstract

A simplified fly-eye light beam equalizer for excimer laser is similar to a 3*3 fly's eye lens array formed by two groups of cylindrical quatz lenses whose generating lines are perpendicular to each other. It central part is a square or rectangular space channel. When an excimer laser with rectangular or square light spot is radiating the equalizer, it can directly pass through central space channel. For the other part, the laser beam is divided into 9 components, which are then added to equalize the light intensity. Its advantages are simple structure and high effect.

Description

Technical field: [0001] The invention relates to a simplified fly-eye lens array beam homogenizer applied to excimer laser. Background technique: [0002] The principle of the excimer laser beam homogenizer is to divide the laser beam into multiple sub-beams, and then re-superimpose, so that the laser light intensity can be averaged on the superimposed surface, so as to improve the uniformity of the beam cross-sectional light intensity distribution. In prior art, commonly used have two kinds. One is a waveguide homogenizer (published in "China Laser" 1995 VolA22, No. 12 894-896), although its manufacture is relatively simple, but the loss of light energy is relatively large. The other is the fly-eye beam homogenizer (published in "China Laser" 1999Vol A26, No. 6 560-564), which can achieve good results and is currently the most commonly used beam homogenizer in laser lithography and microfabrication. The disadvantage is that it is more difficult to process. Invention con...

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Problems solved by technology

One is a waveguide homogenizer (published in "China Laser" 1995VolA22, No.12 894-896), although its production is relatively simple, but the loss of light energy is relatively large

The other is the fly-eye beam homogenizer (published in "China Laser" 1999Vol A26, No. 6 560-564), which can achieve good results and is currently the most commonly used beam homogenizer in laser lithography and microfabrication. The disadvantage is that it is more difficult to process

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