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Pulse preionization high-frequency discharging panel gas laser

A gas laser and high-frequency discharge technology, which is applied in the field of lasers, can solve the problems of low discharge energy density and achieve the effects of good discharge stability, wide application prospects, and high repetition frequency

Inactive Publication Date: 2004-07-07
INST OF ELECTRONICS CHINESE ACAD OF SCI
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AI Technical Summary

Problems solved by technology

However, the DC discharge scheme of pulse pre-ionization still has many defects.
One is that the discharge energy (or power) density injected into the active region is low under non-self-sustained discharge conditions; the other is that although the pulse pre-ionization has a stabilizing effect on the discharge, it is still difficult to avoid arcing

Method used

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  • Pulse preionization high-frequency discharging panel gas laser
  • Pulse preionization high-frequency discharging panel gas laser
  • Pulse preionization high-frequency discharging panel gas laser

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no. 1 example

[0018] figure 2 It is the first embodiment of the present invention, wherein the main discharge electrode 3 is electrically connected to the pre-ionization electrode 1 , and the main discharge electrode 4 is electrically connected to the pre-ionization electrode 2 . A high-frequency square wave switching power supply is used as the main discharge power supply and also as a pre-ionization power supply, and its frequency is between 1kHz and 1MHz. The steep rising and falling edges of the square wave voltage applied to the electrodes contain higher frequency components, which easily enter the discharge area through the pre-ionization dielectric layers 5 and 6, forming a pre-ionization discharge before the main discharge. Because only one high-frequency square wave switching power supply is used, the whole system is more compact.

[0019] image 3 is the second embodiment of the present invention, is figure 2 further simplification and improvement. Wherein, the main discharg...

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Abstract

The pulse pre ionization HF discharge slab geometry gas laser. In the laser resonator, fit the up pre ionization and low pre ionization, the inner surfaces of two electrode have insulation layer, and the up pre ionization electrode and the low ionization electrode each is connected with pulse generator; the two main discharge electrode each is set at the both sides of up pre ionization electrode and low pre ionization electrode, and connected with the output of HF AC power. Also can adopt HF square wave switching power as main discharge power and pre ionization power; can also make the main discharge electrode and pre ionization electrode two in one. This invention has good stability for discharge, implement uniformity of discharge excitation at rectangular tool blank, can run at high recurrence rate or continuous mode.

Description

technical field [0001] The invention relates to laser technology, in particular to a high-frequency discharge slab gas laser using pulse pre-ionization. Background technique [0002] High power gas lasers such as CO 2 Lasers have a variety of discharge excitation methods, among which pulse pre-ionization DC discharge excitation (references: N.A.Generalov, M.I.Gorbulenko.N.G.Solov’yov, M.Yu.Yakimov, V.P.Zimakov.High-power industrial CO 2 Lasers excited by a nonself-sustained glow discharge. In "Gas Lasers-Recent Developments and Future Prospects" edited by W.J.Witteman and V.N.Ochkin.Netherlands: Kluwer Academic Publishers, 1996, 323-341) is a very successful incentive method. The narrow pulse discharge generated by the thyristor pulse modulator is used as the pre-ionization discharge to generate sufficient pre-ionization electron concentration in the laser gas medium, and then the DC discharge is used as the main discharge. The function of pulse pre-ionization is to reduc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S3/038H01S3/09
Inventor 万重怡于延宁
Owner INST OF ELECTRONICS CHINESE ACAD OF SCI
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