Producing method for thin-membrane transistor liquid-crystal displaying device
A liquid crystal display and thin film transistor technology, applied in semiconductor/solid-state device manufacturing, instruments, optics, etc., can solve the problems of complex etching process, cross-cut, affecting TFT-LCD display, etc., to ensure the quality of the effect.
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[0032] In order to more clearly understand the purpose, features and advantages of the present invention, the present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0033] Please refer to FIG. 2a to FIG. 2h for a schematic cross-sectional view of a preferred embodiment of the TFT-LCD manufacturing method developed to improve the prior art according to the present invention.
[0034] As shown in Fig. 2a: First, a first metal layer is deposited on the surface of the glass substrate 30 (it can be done with molybdenum tungsten alloy, chromium, aluminum, aluminum alloy or copper). Then, a first photolithography and etching process is performed to etch the first metal layer to form a gate electrode 31 and a scan line (not shown) connected to the gate electrode 31.
[0035] As shown in Figure 2b: After the first photolithography and etching process is completed, a gate insulating layer 32a and a gate insulating layer 32b are seq...
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