Producing method for thin-membrane transistor liquid-crystal displaying device

A liquid crystal display and thin film transistor technology, applied in semiconductor/solid-state device manufacturing, instruments, optics, etc., can solve the problems of complex etching process, cross-cut, affecting TFT-LCD display, etc., to ensure the quality of the effect.
CN1553269AInactive Publication Date: 2004-12-08吉林北方彩晶数码电子有限公司
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
吉林北方彩晶数码电子有限公司
Publication Date
2004-12-08
Estimated Expiration
Not applicable · inactive patent

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Abstract

In the method, a glass base is provided and the first metal layer is formed on base surface as well as to set up grid electrode and scanning line on it, two layers of grid insulation are deposited in sequence and a semiconductor layer is deposited on the two as well as two blocking layers are deposited in sequence with blocking layer patterns limited, doping semiconductor layer and the second metal layer are deposited on blocking layer and to carry on etching to them, contact hole structure can be formed by depositing two passivation layers in sequence and to etch them, finally a transparent conductive layer is deposited as picture element electrode pattern is limited.
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Description

technical field

[0001] The invention relates to a manufacturing method of a thin film transistor liquid crystal display (TFT-LCD). In particular, it relates to a manufacturing process technology for manufacturing a thin film transistor liquid crystal display by using five photo-etching-processes (PEP). Background technique

[0002] With the rapid development of the electronic information industry, the application range and demand of flat panel displays are increasing. In particular, TFT-LCD has become the mainstream product of LCD development due to its high definition, true color video display, light and thin appearance, low power consumption, and no radiation pollution. The existing seven-pass lithography (7PEP) technology for producing TFT-LCD is mature. However, the number of lithography is many, the production cycle is long, the yield is low, and the cost is high. Therefore, TFT-LCD manufacturers are trying to explore the TFT-LCD manufacturing process technology that...

Claims

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