Micro suspension arm beam driven light intensity modulated type optic-fiber hydrogen sensor

A technology of light intensity modulation and hydrogen sensor, which is applied in the field of sensors, can solve the problems of reduced sensor accuracy and complex sensor structure, and achieve the effects of simplifying the structure, solving the problem of easy damage, and improving the axial driving force

Inactive Publication Date: 2005-03-02
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

However, the structure of this sensor is relatively complex, and it is greatly

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  • Micro suspension arm beam driven light intensity modulated type optic-fiber hydrogen sensor

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Embodiment Construction

[0009] Such as figure 1 As shown, the present invention consists of a light source emitting part 1 and a light source receiving part 2. The light source emitting part 1 includes: a first Si base 3, an optical fiber probe 4, a palladium film 5, a substrate copper-nickel film 6, and a first fiber tail 7 , silicon arm beam 8, its connection relationship is: the palladium film 5 absorbing hydrogen is attached to the substrate copper-nickel thin film 6 which does not absorb hydrogen to form a double-layer film structure, which is attached to the silicon arm beam 8 in turn. One end of the silicon arm beam 8 is fixed on the first Si base 3, the optical fiber probe 4 with light source is attached to the V-shaped groove in the center of the silicon arm beam 8, and the first fiber tail 7 of the optical fiber is connected to the light source. The light source receiving part 2, that is, the light source reference platform, includes: a second Si base 9, an optical fiber interface 10, and a...

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Abstract

An absorbing hydrogen sensing driven by optical electro mechanical system is used in automatic control technical field, comprising light source emission part and light source receive part. Its light source emission part consists of first Si base, palladium film, optical fiber probe, substrate copper-nickel film, first fiber-tail, silicon beam, palladium film adhering to substrate copper-nickel film to form dual-layer structure which adheres successively to silicon beam whose one end fixed on the first Si base, silicon beam has optical fiber probe sticking on it and the first fiber-tail is linked to light source. Its light source receive part consists of second fiber-tail, optical fiber contact, second fiber-tail, optical fiber contact sticking the second Si base, towards optical contact on silicon beam, the second fiber-tail of optical fiber is linked with optical power meter. The invention has increased axial driving force of silicon beam, solved the problem of easy to be destroyed brought by increasing film thickness for raising sensitiveness and simplified instrument structure of this kind notably.

Description

technical field [0001] The invention relates to a sensor used in the technical field of automatic control, in particular to a light intensity modulation optical fiber hydrogen sensor driven by a micro-opto-electromechanical system micro-cantilever beam. Background technique [0002] Hydrogen sensors in the prior art mainly include thin-film resistive, electrochemical and fiber optic sensors. Optical fiber sensors can transfer sensitive information to safe areas in the form of optical signals, which can well avoid potential dangers. In addition, optical fiber sensors also have high sensitivity, high precision, strong anti-interference ability, large dynamic response range, High pressure resistance, corrosion resistance and other outstanding advantages. Metal palladium is the most commonly used sensitive material for various optical fiber hydrogen sensors, because palladium metal can absorb hydrogen in the air and has very strong gas selectivity. The metal target absorbs hyd...

Claims

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Application Information

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IPC IPC(8): G01N21/17G01N21/41G01N21/55G01N31/00
Inventor 陈吉安张晓晶丁桂甫曹颖周业成
Owner SHANGHAI JIAO TONG UNIV
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