Optical switch and fabrication method thereof

An optical switch and manufacturing method technology, applied in optics, optical components, manufacturing tools, etc., can solve the problems of reducing the accuracy of etching patterns, rough sidewalls of micro mirrors, increasing etching masks, etc.
CN1637457AInactive Publication Date: 2005-07-13SAMSUNG ELECTRO MECHANICS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SAMSUNG ELECTRO MECHANICS CO LTD
Publication Date
2005-07-13
Estimated Expiration
Not applicable · inactive patent

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Abstract

The present invention relates to an optical switch and its manufacturing method. In the present invention, the base layer has an input terminal for receiving an optical signal and an output terminal for selectively receiving the optical signal from the input terminal to transmit the optical signal to the outside. In a direction crossing the optical signal, the micro-mirrors are respectively movably located on the optical signal path receiving the optical signal from the input end, so as to selectively change the optical signal from the first optical path to the second optical path. MEMS actuating elements are formed in a layer above the optical path and are connected to the micromirrors, respectively, so as to drive the micromirrors in a direction crossing the optical signal.
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Description

[0001] priority

[0002] This application claims the benefit of Korean Patent Application No. 2004-1360 (filing date: January 9, 2004) filed in the Korean Patent Office, the disclosure of which is incorporated herein by reference. technical field

[0003] The present invention relates to an optical switch and its manufacturing method. More specifically, the optical switch and its manufacturing method of the present invention can form a dual-stage structure of micro-mirrors with different thicknesses and actuating elements, so as to facilitate manufacturing and processing. Furthermore, the optical switch and its manufacturing method in the present invention can shorten the optical path, thereby improving the integration degree and the overall optical transmission performance. Background technique

[0004] As is well known in the art, a matrix optical switch (M-OSW) is a core component of optical communication technology. A matrix optical switch has a matrix consisting of N i...

Claims

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