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Catalyst and method for decomposition of perfluoro-compound in waste gas

A technology of perfluorinated compounds and catalysts, which is applied in the fields of perfluorocarbon/hydrofluorocarbon capture, chemical instruments and methods, physical/chemical process catalysts, etc., which can solve the problem that catalyst life cannot be guaranteed by complex preparation methods of catalysts, etc. problem, to achieve high catalytic activity and durability

Inactive Publication Date: 2005-10-12
KOREA RES INST OF CHEM TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the most important factor in industrialization, namely catalyst life, and the complex preparation method of this catalyst are not guaranteed

Method used

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  • Catalyst and method for decomposition of perfluoro-compound in waste gas
  • Catalyst and method for decomposition of perfluoro-compound in waste gas
  • Catalyst and method for decomposition of perfluoro-compound in waste gas

Examples

Experimental program
Comparison scheme
Effect test

example I

[0056] In order to prepare an alumina catalyst loaded with 2.5 mol% P (Al / P=39), 2.7 g (NH 3 ) 2 HPO 4 impregnated into 40g of alumina (Al 2 o 3 ) powder, then dried in an oven at 100°C for 10 hours, and calcined in a muffle furnace at 750°C for 10 hours.

[0057] Fill 5g of the prepared catalyst into a 3 / 4" Inconel tube, and then carry out the PFC decomposition reaction while passing 1.01ml / min CF 4 , 2.87ml / min O 2 and 89.4ml / min He gas, which corresponds to 1.08vol% CF excluding water at room temperature 4 and 1500h -1 airspeed. Using a syringe pump, introduce 0.04 ml / min of distilled water along with the gas mixture. Calculate CF according to the following formula 1 4 Conversion rate. Such as figure 1 As shown, above 690°C, CF 4 Decomposes to CO with 100% selectivity 2 .

[0058] Formula 1

[0059] CF 4 Conversion = [1-(reactor outlet CF 4 Concentration / reactor inlet CF 4 Concentration)]×100

[0060] Formula 2

[0061] CO 2 Selectivity = (CO produced ...

example II

[0063] After loading the catalyst that 5g example 1 makes, carry out NF under the same reaction condition with example 1 3 decomposition reaction. instead of CF 4 , put 1.01ml / min NF 3 , 2.87ml / min O 2 And 89.4ml / min He gas was fed into the reactor together with 0.04ml / min distilled water. Such as figure 1 shown, above 400°C, 100% NF 3 Decomposed. After reacting at 500° C. for 10 hours, the catalyst was subjected to elemental analysis using an energy dispersive x-ray analyzer (EDAX). It was found that the F component did not accumulate in the catalyst even after the reaction.

example III

[0065] After loading the catalyzer that 5g example 1 makes, carry out C under the identical reaction condition with example II 4 f 8 decomposition reaction. replace NF 3 , put 1.08ml / min C 4 f 8 , 2.87ml / min O 2 And 89.4ml / min He gas was fed into the reactor together with 0.04ml / min distilled water. It was found that above 690°C 100% C 4 f 8 is decomposed into CO 2 (see figure 1 ).

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Abstract

The present invention relates to a catalyst for the decomposition of exhausted perfluoro-compounds (PFCs) and a catalytic decomposition method of PFCs by using the same. More particularly, the present invention relates to a PFC decomposition catalyst prepared in such a manner that a surface of aluminum oxide is loaded with phosphorous (P) component at a aluminum / phosphorous mole ratio of 10 to 100 and a decomposition method of PFCs by using the catalyst. The present catalyst can be decomposed PFCs at 100% rate exhausted from semiconductor manufacturing industry and thus prevent the release of PFCs having high global warming potential into atmosphere.

Description

technical field [0001] The present invention relates to a catalyst for decomposing perfluorinated compounds (PFCs) in exhaust gas and a method for decomposing perfluorinated compounds using the catalyst. More specifically, the present invention relates to a catalyst for decomposing PFCs, which is prepared by loading phosphorus (P) components on the surface of alumina with a molar ratio of aluminum / phosphorus in the range of 10-100, and also relates to a A method for decomposing PFCs using the catalyst. The catalyst of the invention can 100% decompose the waste PFCs in the semiconductor and LCD manufacturing processes, thereby preventing the PFCs that cause global warming from being released into the atmosphere. Background technique [0002] PFCs are widely used as etchant in semiconductor or LCD etching process and as cleaning gas in chemical vapor deposition process. PFCs with the above uses include CF 4 、CHF 3 、CH 2 f 2 、C 2 f 4 、C 2 f 6 、C 3 f 6 、C 3 f 8 、C ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J27/18B01D53/86B01J27/14B01J27/16B01J37/02
CPCY02C20/30B01J27/16B01D53/8659B01J37/0201B01J27/18
Inventor 朴容起全钟烈金希永李东彩
Owner KOREA RES INST OF CHEM TECH
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