Vertical structure semiconductor chip or device growthing on silicone substrate
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- ιθ
- Publication Date
- 2005-10-26
- Estimated Expiration
- Not applicable Β· inactive patent
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Abstract
Description
technical field
[0001] The invention discloses a high-quality vertical structure gallium nitride-based semiconductor light-emitting diode grown on a large-diameter silicon substrate and the technology and process of growing it on a silicon wafer, belonging to the field of semiconductor electronics technology. Background technique
[0002] High-power semiconductor light-emitting diodes have great prospects to replace incandescent lamps, but first, technical problems must be solved. The main problems include low light extraction efficiency, low heat dissipation efficiency, and high production costs.
[0003] In order to solve the heat dissipation problem of high-power GaN-based semiconductor light-emitting diodes with a lateral structure, flip-chip bonding technology was proposed. However, the flip-chip technology is complex in process and high in cost. Therefore, a large amount of research has been devoted to a gallium nitride-based semiconductor light-emitting diode with a ...