Micro interior cavity dimension measuring apparatus and method based on double optical fiber coupling

Abstract

The invention discloses a micro internal cavity size measuring apparatus based on double fiber optical coupling, which comprises: a sighting and sending apparatus used to generate sighting signals and feedback the result to the controller, a length-measuring device used to measure the moving distance of the micro cavity in the time internal of opening or ending signals from the sighting and sending apparatus, and a controller used to control all of the automatic measuring course of the measuring device. It is characterized in that the sighting and sending apparatus comprises a laser couple unit, a data gather processing unit and double fiber optical coupling unit, wherein in the double fiber optical coupling unit, it uses a fiber optical as incidence fiber optical; the other one as ejecting fiber optical; one ends of the two pieces of the fiber optical are connected with the coupler. The invention also discloses a micro internal cavity size measuring method based on double fiber optical coupling.

Description

technical field [0001] The invention relates to a method and device for measuring the size of a tiny inner cavity, which is not only applicable to the field where the traditional contact measurement method is applied, but is especially suitable for the measurement field of the structure size of a tiny and complex inner cavity, especially Measurement of the size of tiny inner cavities in the "sub-macroscopic" field. Background technique [0002] With the continuous development of the aerospace industry, automobile industry and cutting-edge industries, the size of the micro-cavity has become more and more extensive, and the measurement of the size of the precise micro-cavity has become a constraint to improve the performance of aerospace and automotive devices. "Bottleneck", it is urgent to explore a practical measurement method. [0003] The problem of precise measurement of the size of the tiny inner cavity is a new problem in the measurement field, which implies many key t...

AI Technical Summary

Problems solved by technology

However, in this method, most of the light of the light beads through the optical fiber does not enter the optical system for imaging, and the image signal captured by the CCD is weak, which is not conducive to the subsequent image processing; The measurable depth is very small, and in the case of a large depth-to-diameter ratio, the measurement work cannot be completed when the depth-to-diameter ratio is greater than 10:1; and due to the depth of field effect of the optical objective lens in the CCD receiving system, when the microsphere touches the hole wall And when the lateral displacement is small, the image of the light beads does not change, so that the measurement accuracy of the sensor is not high and the sensitivity is low

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