Thin film patterning apparatus and method of fabricating color filter array substrate using the same
A technology of a color filter array and a manufacturing method, which is applied in the directions of optical filters, photolithographic process exposure devices, optics, etc., can solve the problems of a long time, waste of photoresist, increase of manufacturing process time and cost, etc.
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[0051] Preferred embodiments of the present invention will be described in detail with reference to Examples illustrated in the accompanying drawings. Below, will refer to Figures 6 to 17E Preferred embodiments of the present invention are described in detail.
[0052] Figure 6 and 7 are respectively a plan view and a cross-sectional view showing the color filter array substrate according to the first embodiment of the present invention. refer to Figure 6 and 7 , the color filter array substrate according to the first embodiment of the present invention includes a black matrix 102 formed on an upper substrate 101; red, green and blue color filters 104R, 104G and 104B; a coating with a white color filter 104W layer 122; and liner 124 formed on coating layer 122.
[0053] The black matrix 102 is formed on the upper substrate 101 in a matrix form to define a plurality of unit regions forming the color filters 104 and to prevent light interference between adjacent units. ...
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