Panel display having integrated vertical groove type cathode structure and its manufacturing technology

A flat-panel display and cathode structure technology, applied in cold cathode manufacturing, electrode system manufacturing, discharge tube/lamp manufacturing, etc., can solve problems restricting the application of carbon nanotubes, achieve good field emission characteristics, prevent ignition, The effect of reducing production costs

Inactive Publication Date: 2006-06-28
ZHONGYUAN ENGINEERING COLLEGE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the limitations of other device structures, such as the temperature limit that the cathode substrate material can withstand, the thermal expansion of the cathode substrate material, and the material selection of the cathode substrate material, etc., all restrict the carbon nanotubes prepared by the direct growth method. application

Method used

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  • Panel display having integrated vertical groove type cathode structure and its manufacturing technology
  • Panel display having integrated vertical groove type cathode structure and its manufacturing technology
  • Panel display having integrated vertical groove type cathode structure and its manufacturing technology

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Embodiment Construction

[0037] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the present invention is not limited to these embodiments.

[0038] A flat-panel display with an integrated vertical groove-like cathode structure includes a sealed vacuum chamber composed of a cathode panel 1, an anode panel 10 and a surrounding glass frame 9; a control grid 4 for controlling electron emission and a carbon nanometer for growth Tube cathode 8; photolithographic anode conductive layer 11 on anode panel 10 and phosphor layer 13 prepared on anode conductive layer 11; supporting wall structure 15 and getter attachment 14. An integrated vertical groove-shaped cathode structure is fabricated on the cathode panel 1, which greatly increases the emission area of ​​the carbon nanotube cathode, fully utilizes the good field emission characteristics of the carbon nanotubes prepared by the direct growth method, and simultaneously The control gate ...

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Abstract

This invention relates to a panel display with an integrated vertical slot cathode structure and its process technology, in which, the display includes a sealed vacuum cavity composed of a cathode panel, an anode panel and surrounding glasses, a control grating for controlling electronic emission and grown carbon nm tube cathode, a photoetched anode conduction layer on the anode panel and a fluorescence powder layer on the conduction layer, a wall supporting structure and getters, in which, the emission area is enlarged since an integrated vertical slot cathode structure is processed on the cathode panel, the fine field emission property of the carbon nm tube prepared by a direct growing method is fully used and the control grating is highly integrated with the cathode structure to control the electronic emission to increase the emission efficiency.

Description

technical field [0001] The invention belongs to the fields of plane display technology, microelectronic science and technology, vacuum science and technology, and nano science and technology, and relates to the manufacture of flat panel field emission displays, in particular to flat panels for carbon nanotube cathodes. The content of device fabrication of field emission display, especially relates to the fabrication process of field emission flat panel display with integrated vertical groove cathode structure and carbon nanotube cathode. Background technique [0002] Carbon nanotubes have a unique geometric shape, small tip curvature radius, high aspect ratio and excellent physical and chemical properties, which have attracted the attention of many researchers. Carbon nanotubes also have unique cold field emission characteristics, that is, when an external voltage is applied to the cathode of carbon nanotubes, a strong electric field strength will be formed at the top of the...

Claims

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Application Information

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IPC IPC(8): H01J29/02H01J1/304H01J9/00H01J9/02H01J29/04H01J31/12
Inventor 李玉魁
Owner ZHONGYUAN ENGINEERING COLLEGE
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