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Factory production working system and its operating method

A processing system and factory-produced technology, applied in the direction of exposure devices, optics, instruments, etc. in the photoengraving process, which can solve the problems of multiple production lines, production line stoppages, and unsmooth logistics transmission lines, and achieve smooth logistics and reduce manufacturing costs. Effect

Inactive Publication Date: 2006-08-09
CHUNGHWA PICTURE TUBES LTD
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  • Application Information

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Problems solved by technology

It is worth noting that although the known continuous factory production and processing system can effectively overcome the shortcomings of the unsmooth logistics transmission line of the group factory production and processing system, there are the following problems, such as (1) if used in production When a large number of products are produced, more production lines are required, in other words, more production equipment must be purchased, resulting in a higher investment in production equipment; and (2) when any production equipment on any production line fails , it may cause the production line to stop

Method used

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  • Factory production working system and its operating method
  • Factory production working system and its operating method
  • Factory production working system and its operating method

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Embodiment Construction

[0011] Figure 2A It is a schematic diagram of a factory production and processing system in a preferred embodiment of the present invention. Figure 2B for Figure 2A Schematic diagram of the route of the transmission system of the production and processing system in the factory. Please also refer to Figure 2A and 2B , the factory production and processing system 200 of the present invention is suitable for manufacturing liquid crystal displays (Liquid Crystal Display, LCD) or other semiconductor components. Engraving process equipment groups 230a, 230b, two etching equipment groups 240a, 240b, two photoresist stripping equipment groups 250a, 250b, etc. The transport system 210 includes, for example, an automated material handling system (Automatic Material Handling System, AMHS), etc., and the automated material handling system, for example, at least includes an automatic guided vehicle (Automatic Guided Vehicle, AGV), an in-line storage warehouse (In-Line Stocker) or ...

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Abstract

The system of processing includes at least transmission system, two sets of deposition equipment, etching apparatus set, photoetching technical equipment set, and two sets of photoresistive divesting equipment. The transmission system includes multiple transmission paths. At least two connected circular paths are included in the transmission paths. Connected place between two circular paths is as public path. photoetching technical equipment set is setup on two circular paths between two sets of deposition equipment. The disclosed system of processing integrates both advantages of cluster type system of processing, and continuous type system of processing.

Description

technical field [0001] The present invention relates to a processing system and its operating method, and in particular relates to a factory production processing system and its operating method. Products with multiple processes. Background technique [0002] As far as the production of Thin Film Transistor-Liquid Crystal Display (TFT-LCD) is concerned, its factory production and processing system usually includes transmission system, deposition equipment group, etching equipment group, photolithography process equipment group and photoresist stripping equipment etc. Because the production equipment of thin film transistor liquid crystal display (TFT-LCD) is sophisticated, the cost is high, and the operating rate of production equipment is low, the layout of its production equipment is mainly group-type. The following is a brief description of group-type factory production Machining system and method of operation thereof. [0003] The known group factory production and pr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/136G02F1/133G03F7/20H01L21/027
Inventor 童耀毅蔡毓仁李威良张清祥叶松兴
Owner CHUNGHWA PICTURE TUBES LTD
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