Making process of C/C heater for monocrystal silicon drawing furnace and polycrystal silicon smelting furnace
A heater and polysilicon technology, applied in the field of heating furnace heaters, can solve the problems of difficulty in meeting the development requirements of semiconductor polysilicon and single crystal silicon production, difficulty in forming large-scale products, poor high-temperature thermal shock resistance, etc., and achieve a compact effect Good, implementable, enhanced strength effect
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[0024] Example 1
[0025] (1) Adopt 12K needle-punched carbon cloth and non-weft cloth to combine a full carbon fiber three-way structure heater preform, the heater preform has a bulk density of 0.3g / cm 3 , Needle punching technology is used to introduce reinforcing fibers in the vertical direction of the heater preform, where K represents the number of tows;
[0026] (2) Pitch impregnation carbonization densification process: under a pressure of 1.5MPa, the heater preform in step (1) is put into an impregnation tank for 5 hours, the pitch preheating temperature is 190℃, and the heater preform is impregnated Transfer to the carbonization furnace for carbonization treatment, and the carbonization temperature is 1000°C;
[0027] (3) Process the heater products in the step (2) densification process in the treatment furnace, and the treatment temperature is 1800°C;
[0028] (4) Furfurone resin impregnation carbonization densification process: at a preheating temperature of 60℃, first ...
Example Embodiment
[0032] Example 2
[0033] (1) Adopt 12K needle-punched carbon cloth and non-weft cloth to combine a full carbon fiber three-way structure heater preform, the heater preform has a bulk density of 0.5g / cm3 , Needle punching technology is used to introduce reinforcing fibers in the vertical direction of the heater preform, where K represents the number of tows;
[0034] (2) Pitch impregnation carbonization densification process: under a pressure of 1.0 MPa, the heater preform in step (1) is put into an impregnation tank for 5 hours, the pitch preheating temperature is 190 ℃, and the heater preform is impregnated After transfer to the carbonization furnace for carbonization treatment, the carbonization temperature is 800℃;
[0035] (3) Process the heater products in the step (2) densification process in the treatment furnace, and the treatment temperature is 2000°C;
[0036] (4) Furfurone resin impregnation carbonization densification process: at a preheating temperature of 60℃, first...
Example Embodiment
[0040] Example 3
[0041] (1) Adopt 12K needle-punched carbon cloth and non-weft cloth to combine a full carbon fiber three-way structure heater preform, the heater preform has a bulk density of 0.6g / cm 3 , Needle punching technology is used to introduce reinforcing fibers in the vertical direction of the heater preform, where K represents the number of tows;
[0042] (2) Pitch impregnation carbonization densification process: under the pressure of 1.4MPa, the heater preform in step (1) is put into an impregnation tank for 5 hours, the pitch preheating temperature is 190℃, and the heater preform is impregnated After transfer to the carbonization furnace for carbonization treatment, the carbonization temperature is 1100℃;
[0043] (3) Process the heater products in the step (2) densification process in the treatment furnace, and the treatment temperature is 1500°C;
[0044] (4) Furfural ketone resin impregnation and carbonization densification process: At a preheating temperature o...
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