Monolithic integrated sensor chip for measing three parameters of pressure difference, absolute pressure and temperature and its making process

Abstract

The invention relates to a differential pressure/absolute pressure/temperature three parameter monolithic integrated sensor chip, wherein the chip structure includes a sensing resistor, silicon membrane and glass substrate, a relatively independent pressure difference sensing unit I and an absolute pressure sensing unit II are formed in the chip, and a temperature sensing unit III is arranged on a peripheral silicon substrate. The invention is characterized in that in the same chip three sensing units of differential pressure, absolute pressure and temperature are integrated, four raised independent P type silicon resistor strips are respectively distributed on fronts of the differential pressure sensing unit I and the absolute pressure sensing unit II, namely a differential pressure resistor (5) and an absolute pressure resistor (6), and one raised silicon resistor strip, namely a temperature sensing resistor (7), is respectively distributed on the temperature sensing unit III. The inventive method makes the performance of the differential pressure/absolute pressure/temperature three parameter sensor to be reliable, the cost to be lowered, so that the batch production is realized. The measurement of pressure, differential pressure and temperature under a high wide temperature environment is solved.

Description

Technical field [0001] The invention belongs to the technical field of microelectronics and micromechanical processing fusion, and relates to a single-chip integrated sensor chip with three parameters of differential pressure / absolute pressure / temperature and a preparation method thereof. Background technique [0002] Sensor technology is currently one of the fastest growing high-tech in the world, and its production capacity and application level determine the development speed of information technology and industrial automation technology. The development of high-performance, high-reliability, multi-parameter and intelligent sensors has become an urgent need for industrial control systems. Sensors are developing to a new height, and a large number of new technologies are adopted to realize intelligence, miniaturization, precision, and multi-parameterization. [0003] The current domestic research on sensor integration includes: integrating the sensitive chip and the processing ...

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Problems solved by technology

[0004] In the world, the ST3000 sensor, which was first introduced by the American Honeywell Company in the 1980s, integrates three sensitive elements of differential pressure, static pressure and temperature on the same chip, and then combines the sensitive chip with CPU, EPROM, etc., from the digital Solve the static pressure compensation and temperature compensation problems of the sensor in terms of calculation, change the situation that the static pressure cannot be compensated, only rely on the process to solve, and the temperature compens

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