Unlock instant, AI-driven research and patent intelligence for your innovation.

Process for precise arrangement of micro-bodies

a micro-organism and precise technology, applied in the field of process for precise arrangement of micro-organisms, can solve the problems of limited number of methods for arraying micro-organisms of small sizes, difficult to apply such methods to micro-organisms of 100 microns or less, and difficult to manipulate individual micro-organisms

Inactive Publication Date: 2005-03-17
FUDOJI HIROSHI +4
View PDF4 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0005] In order to solve the above-specified problems, according to the invention, there is provided a process for precise arrangment of a micro-

Problems solved by technology

It is, however, seriously difficult to apply such method to micro-bodies of 100 microns or less, for example, in the field governed by the surface force.
On the other hand, the method of arraying the micro-bodies of small sizes are limited in number to the micro-pincette method, the laser manipulation method, the jet printing method and so on.
According to these methods, however, the manipulations of the individual micro-bodies are not basically easy, which raise the working load, the working time period and the cost seriously.
In the methods of the prior art, however, there arise problems that the arrangement takes an extremely long time period, and that the range of application is restricted.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Process for precise arrangement of micro-bodies
  • Process for precise arrangement of micro-bodies
  • Process for precise arrangement of micro-bodies

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0023]FIG. 1 exemplifies a process using a converging ion beam. This process comprises three steps: (a) of forming charged spots 3 on a substrate 2 by a converging ion beam 1; (b) of feeding micro-bodies 4 onto the charged spots 3; and (c) of arranging the micro-bodies 4 on the charged spots 3.

[0024] At the first step (a), for example, the charged positive spots 3 were formed on the insulating substrate 2 of calcium titanate ceramics by using a Ga−-converging ion beam at an acceleration voltage of 30 KV.

[0025]FIG. 2 exemplifies an image of the charged positive spots having a size of 5 microns which were formed on the substrate charged at an interval of 50 microns. The observation was made as a secondary-electron contrast image by using a scanning electron microscope of a low acceleration voltage (of 2.5 KV)

[0026] At the next step (b), as the micro-bodies to be arranged, microbodies 4, which were made of simply dispersed metal-coated spherical polymer particles having a diameter o...

example 2

[0028] Negatively charged spots are to be formed if a minute charged pattern can be formed by using a converging electron beam in place of the converging ion beam at the step (a) of FIG. 1. It was, therefore, confirmed that the minute charged pattern could be formed on the insulating substrate of calcium titanate ceramics by using the converging electron beam. A lattice pattern of an interval of 100 microns was drawn by using the converging electron beam of an acceleration voltage of 15 KV. FIG. 4 presents an observation with a scanning electron microscope of an acceleration voltage of 2 KV, that is, a secondary-electron contrast image of the charged pattern. A white lattice contrast pattern of an interval of 100 microns was observed. This contrast pattern implies the charge with the negative polarity and had a line width of about 20 microns. It can be conceived from this result that the charged spots couldbe formed by using the converging electron beam to arrange the particles of 2...

example 3

[0029]FIG. 5 shows a process for forming the charged spots by using a microprobe. In a construction comprising: a tungsten microprobe 1 (as will be abbreviated into the “probe”) having a leading end diameter of 2 microns; a polytetrafluorethylene thin film 2 having a thickness of 50 microns; a glass substrate (as will be abbreviated into the “substrate”) 3 treated to have a conductivity and a thickness of 1 mm; and a variable power supply 4 of rated 10 KV and 1 mA, the probe 1 was connected with the negative side of the power supply 4, and the substrate 3 was grounded to the earth. The thin film 2 was adhered to the substrate 3 by means of a conductive double-coated tape. At a first step a, therefore, the probe 1 was moved from a reference point on the substrate 3 to over a portion at which the charged spot was to be formed, and was so brought into contact with the thin film 2 that the thin film 2 might not be broken. At a next step b, the power supply 4 was used to apply a voltage ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A process for arranging a number of micro-bodies efficiently and precisely as one on one spot on a substrate. Charged spots are formed by a converging ion beam or the like on a substrate having an insulating property or the like, and micro-bodies having a size of 200 microns or less are attracted and stuck to the charged spots.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a process for precise arrangment of micro-bodies. More particularly, the invention relates to a novel process for precise arrangment of micro-bodies, which is useful for finely working a precision machine or for integrating an electronic device. This process can arrange micro-bodies having a size of 400 microns or less, e.g., 200 microns, such as spacer particles in a liquid crystal device or the like, ball-grid-array particles in the packaging technical field of electronic parts, or minute parts in a semiconductor element or a micro-machine, precisely at target pin-point positions for a short time period. [0003] 2. Related Art [0004] In the prior art, bodies or articles in the field governed by the gravity have been transferred to and arranged at predetermined positions by existing mechanical technique (such as the vacuum chucking method). It is, however, seriously difficult to appl...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H05K3/34B01J19/08G01N37/00G02F1/1339H01L21/48H01L21/98H01L23/12
CPCH01L21/4853H01L24/95H01L25/50H01L2924/01004H01L2924/0102H01L2224/95145H05K3/3478H01L2924/01005H01L2924/01006H01L2924/01033H01L2924/01074H01L2924/01082H01L2924/12042H01L2924/00
Inventor FUDOJI, HIROSHIKONNO, TAKESHIEGASHIRA, MITSURUKOBAYASHI, MIKIHIKOSHINYA, NORIO
Owner FUDOJI HIROSHI