Atomic layer deposition of noble metals

a noble metal and atomic layer technology, applied in the field of atomic layer deposition of noble metals, can solve the problems of inability to produce many useful cvd precursors, high cost of palladium, and inability to meet the requirements of atomic layer deposition,
US20060093848A1Inactive Publication Date: 2006-05-04SENKEVICH JOHN JOSEPH +1
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
SENKEVICH JOHN JOSEPH
Publication Date
2006-05-04
Estimated Expiration
Not applicable · inactive patent

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Abstract

The present invention relates to ALD processes for deposition of a metal selected from Pd, Rh, Ru, Pt and Ir wherein a layer including the metal is formed on a surface composed of a material selected from W, Ta, Cu, Ni, Co, Fe, Mn, Cr, V Nb, tungsten nitride, tantalum nitride, titanium nitride, dielectrics and activated dielectrics at a temperature ranging from >60° C. to <260° C. The layer is formed by sequentially pulsing into a chamber containing the surface a precursor for the metal and a reducing gas selected from hydrogen, glyoxylic acid, oxalic acid, formaldehyde, 2-propanol, imidazole and plasma-activated hydrogen.
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Description

RELATED APPLICATION

[0001] This application claims the benefit of U.S. Patent Application Ser. No. 60 / 418,519, filed Oct. 15, 2002.BACKGROUND OF THE INVENTION

[0002] The use of self-limiting chemical reactions to sequentially grow monolayers of transition metals will positively impact many and diverse applications. For example, among the applications for metal atomic layer deposition (ALD) are noble metal catalysts on rough electrode and mesoporous bulk materials, Cu seed layers for the electrochemical deposition and chemical vapor deposition of Cu, conformal adhesion layers to Cu metallic overlayers and alkylthiolate self-assembled monolayers. Palladium is useful as a catalyst in fuel cells and for hydrogenation reactions, gas sensors, and hydrogen permselective membranes. Palladium, like the other noble metals, is rather costly; therefore, a driving force exists to reduce the quantity used as a function of its activity. Atomic layer deposition is an ideal method for extracting the...

Claims

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