Microfabricated Beam Modulation Device

Abstract

A beam modulation device gate is constructed from a silicon material, such as a silicon layer on an silicon on insulator wafer. The device further comprises a set of electrical contacts on the layer. The layer defines a set of electrically conducting silicon material fingers forming an array, wherein each of at least some of the fingers is connected electrically to one of the electrical contacts. The gate may be used in a mass or ion mobility spectrometer. Where the gate is constructed from a silicon on insulator wafer, an insulator layer supports the silicon layer and a handle layer supports the insulator layer. When predetermined electrical potentials are applied to the electrical contacts, at least some of the fingers will be substantially at said predetermined electrical potentials to modulate a beam of charged particles that passes through said array of fingers. A plurality of devices of the type above may be used, where each of the devices modulates the beam so that the beam is deflected along a direction different from direction along which the beam is deflected by any of the remaining devices. A plurality of devices of the type above may be used for a mass gate or charged particle buncher device. For making an ion optical device, an array of fingers is formed in a silicon layer of the silicon on insulator wafer. A portion of a handle layer of the wafer on a side of an insulator layer of the wafer opposite to that of the fingers is removed; and a portion of the insulator layer is removed so that the fingers are connected to the wafer only through the silicon layer and at one end of the fingers.

Description

CROSS REFERENCE TO RELATED APPLICATION [0001] This application is a continuation of application Ser. No. 11 / 107,583, filed on Apr. 15, 2005, which application is incorporated herein in its entirety by this reference.[0002] This invention was supported in part by an Air Force Office of Science Grant number AF03T003. The United States Government has rights in this invention.FIELD OF THE INVENTION [0003] This invention relates in general to devices and techniques for modulating beams of charged particles, and in particular to such devices and techniques that employ microfabrication to make the devices. BACKGROUND OF THE INVENTION [0004] Time-of-flight mass spectrometry (TOFMS) is an inexpensive analytical technique that has become the preferred choice for monitoring a variety of chemical separation processes that require mass discrimination. In one TOFMS technique that circumvents the problems associated with pulsing continuous ion beams, called Hadamard transform time-of-flight mass s...

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