Laser plasma spectroscopy apparatus and method for in situ depth profiling

Abstract

An in-situ laser plasma spectroscopy (LPS) system for automated near real-time elemental depth profiling of a target including: an optical source configured to generate an optical beam, wherein the optical beam is pulsed; an optical probe system configured to deliver the optical beam from the optical source to a surface of a target to generate an ablation plasma; a time resolved spectral detection system configured to generate time resolved spectral data from emission signals from the ablation plasma; and a data acquisition and processing system configured to acquire the time resolved spectral data to determine, in combination with predetermined calibration data, an absolute elemental concentration as a function of depth in near real-time.

Description

BACKGROUND[0001]The invention relates generally to depth profiling and more particularly to depth profiling using laser plasma spectroscopy.[0002]Exposure to high temperatures for extended periods of time can damage metal parts of machinery such as buckets, blades, and nozzles in turbine engines. In gas turbine engines, such damage can result in a reduction in airflow and thus efficiency. Damage to blades can eventually lead to failure of the engine. Coatings are frequently used to protect metal parts such as turbine blades from the effects of high temperature exposure for extended time periods that can damage the blades and reduce lifetime. Although the coatings extend the lifetime of the metal components, the coatings themselves are affected by this exposure over time.[0003]Currently, all the buckets, blades, and nozzles are stripped and recoated after a given exposure interval, or the engine is partially disassembled and a sample part is removed and sacrificed for analysis. Both ...

AI Technical Summary

Problems solved by technology

Exposure to high temperatures for extended periods of time can damage metal parts of machinery such as buckets, blades, and nozzles in turbine engines.

In gas turbine engines, such damage can result in a reduction in airflow and thus efficiency.

Damage to blades can eventually lead to failure of the engine.

Although the coatings extend the lifetime of the metal components, the coatings themselves are affected by this exposure over time.

Although a number of analytical techniques exist for measuring elemental concentration as a function of depth, they all either invoke destructive analysis of the part or substrate (e.g., secondary ion mass spectroscopy and electron microprobe analysis) or cannot be performed remotely or in situ (e.g., laser ablation mass spectroscopy), especially in real time.

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