Multifunction abrasive tool with hybrid bond

Abstract

Abrasive tools and techniques are disclosed that can cut hard, brittle materials to relatively precise dimensions. The tools, which can include a hybrid bond of metal or metal alloy and a resin matrix together with fine abrasive grits, can be employed, for example, in mirror finish cutting applications, thereby enabling ‘1×’ or ‘single-pass’ multi-function abrasive processes. The specific selection of resin and metal or metal alloy types is such that the tool is sufficiently brittle for the purpose of manufacture and durability, but ductile enough to withstand the grinding and handling stresses (an exemplary hybrid bond includes bronze and polyimide). Numerous tool types and applications will be apparent in light of this disclosure, including abrasive products for electronic device manufacturing such as thin 1A8 blades (single blade or multi-blade configuration).

Description

FIELD OF THE DISCLOSURE[0001]The disclosure relates to abrasives technology, and more particularly, to abrasive tools suitable, e.g., for simultaneously performing multiple functions, such as dicing and polishing of hard brittle materials.BACKGROUND[0002]Resin-metal or so-called “hybrid” bonds are generally known in the superabrasives industry. The first resin bonds for diamond tools were based on phenolic systems. It was soon found that the resin itself was not optimum, on its own, for some applications. Thus, tool makers introduced secondary fillers to modify the properties of the resin and enable the performance of tools in various applications to be improved. In particular, silicon carbide powder was introduced where a more brittle, friable bond was needed, and copper powder was introduced when a stronger, tougher bond was required (e.g., copper metal bond tools were used in antiquity with natural diamond powder for cutting gemstones). These fillers are still used in many conven...

AI Technical Summary

Benefits of technology

[0057](g) lapping sides of the tool to provide desired degree of straightness and thickness (e.g., an axial thickness of the tool being substantially uniform at all radii from the radius of the arbor hole to the outer radius of the tool, with the final thickness being, e.g., about 65 microns). This lapping can be implemented as double-sided lapping, so as to further improve straightness.

[0058]The abrasive grits (e.g., diamonds) are generally present in both the br

Problems solved by technology

It was soon found that the resin itself was not optimum, on its own, for some applications.

Manufacturing of the slider component presents a number of challenges.

Exacerbating this manufacturing complexity is the fact that sliders are typically made from hard brittle materials (e.g., Al2O3—TiC, see for example U.S. Pat. No. 4,430,440), which are difficult to cut without incurring problems such as chipping and excessive kerf.

In general, the specific selection of resin and metal alloy types is such that the tool is sufficiently brittle for the purpose of manufacture and durability, but ductile enough to withstand the grinding and handling stresses (i.e., overly stiff tools are susceptible to breakage).

However, the use of cobalt can pose a number of issues.

Specifically, a cobalt-based product is typically very brittle and tends to break in handling and use.

In addition, use of cobalt leads to a structure that is under-sintered and possesses poor grit retention (this is because cobalt doesn't flow very well at process temperatures associated with suitable resins).

Depending on context, cobalt can be environmentally unfriendly.

Furthermore, the high stiffness of cobalt may not be transferred to the tool due to sliding at the cobalt-resin interface.

Another subtle but significant issue associated with using cobalt is related to magnetic properties.

To this end, it is believed that the cobalt in a cobalt-based blade may upset the magnetic properties of the sliced and polished workpiece (e.g., Al2O3—TiC sliders).

However, the tool configured in accordance with this embodiment was relatively harder than the cobalt-based tool, and exhibited both lower tool wear and smaller kerf relative to the cobalt-based tool.

In more detail, while tolerances in a single blade embodiment may be acceptably higher, such high tolerances in a gang configuration may stack up to provide undesirable results (e.g., lack of desired precision).