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Method for Fabricating Array-Molded Package-on-Package

a technology of array-molded packages and integrated circuits, applied in semiconductor devices, semiconductor/solid-state device details, electrical apparatus, etc., can solve the problems of increasing product warpage problems, reducing product thickness, and no longer being acceptable in recent applications, so as to improve testability and thus yield, and reduce cost and simplify the effect of approach

Inactive Publication Date: 2011-07-07
TEXAS INSTR INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0006]The invention solves the problem by constructing one mold portion with contours so that the molded device will offer direct coupling with another device to form a package-on-package product. In addition, the new fabrication method is low-cost and simplified, and the products provide improved testability and thus yield. Using these contoured molds, stacking chips and packages will shorten the time-to-market of innovative products such as vertically integrated semiconductor systems, which utilize available chips of various capabilities (for example processors and memory chips), eliminating the wait for a redesign of chips.
[0007]Based on the contoured mold equipment, package-on-package devices can be produced with excellent electrical performance, mechanical stability free of warping, and high product reliability. Further, it is a technical advantage that the fabrication method is flexible enough to be applied for different semiconductor product families and a wide spectrum of design and process variations.

Problems solved by technology

This simple approach, however, is no longer acceptable for the recent applications especially for hand-held wireless equipments, since these applications place new, stringent constraints on the size and volume of semiconductor components used for these applications.
This trend to reduce product thickness initiated an increasing tendency to have product warpage problems, especially in thin assemblies, caused by the mismatch in the coefficients of thermal expansion (CTE) between the semiconductor chip, the plastic substrates, the molding compound, the solder balls, and the printed circuit board.
Warpage can lead to some of the most debilitating problems encountered by semiconductor assemblies such as the fracture and separation of solder joints, or the separation of materials followed by moisture ingress.

Method used

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Examples

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Embodiment Construction

[0033]FIGS. 1A through 7 illustrate schematically the steps of one embodiment of the present invention, a method for array-molding semiconductor devices. The steps shown in FIGS. 1A and 1B show the assembly of a semiconductor chip on a substrate by wire bonding (FIG. 1A) and by flip-chip technology (FIG. 1B); FIG. 1C exemplifies a portion of an array of chips assembled by flip-chip. A sheet-like substrate 101 with insulating core (for example, plastic, glass-fiber reinforced, ceramic) is integral with two or more patterned layers of conductive lines and conductive vias 111 (preferably copper) and contact pads in pad locations. Lines 110 do not reach beyond the boundaries of substrate 101. Substrate 101 has a first surface 101a and a second surface 101b, and a preferred thickness range from 0.2 to 0.5 mm. The first surface 101a includes chip assembly sites 102 and contact pads 103 in pad locations. The metal of the contact pads is preferably copper with a solderable surface (for exam...

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PUM

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Abstract

An improved semiconductor device package is manufactured by attaching semiconductor chips (130) on an insulating substrate (101) having contact pads (103). A mold is provided, which has a top portion (210) with metal protrusions (202) at locations matching the pad locations. The protrusions are shaped as truncated cones. The substrate and the chips are loaded onto the bottom mold portion (310); the mold is closed by clamping the top portion onto the bottom portion so that the protrusions approach the contact pads. Encapsulation compound is introduced into the cavity and the protrusions create apertures through the encapsulation compound towards the pad locations.

Description

[0001]This is a divisional application of application Ser. No. 11 / 750,757 filed May 18, 2007, the contents of which are herein incorporated in its entirety.FIELD OF THE INVENTION[0002]The present invention is related in general to the field of semiconductor devices and processes and more specifically to the structure and fabrication method of low-profile, vertically integrated package-on-package integrated circuit assemblies.DESCRIPTION OF THE RELATED ART[0003]The thickness of today's semiconductor package-on-package products is the sum of the thicknesses of the semiconductor chips, electric interconnections, and encapsulations, which are used in the individual devices constituting the building-blocks of the products. This simple approach, however, is no longer acceptable for the recent applications especially for hand-held wireless equipments, since these applications place new, stringent constraints on the size and volume of semiconductor components used for these applications.[00...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L21/82H01L21/56H01L21/782
CPCH01L21/561H01L21/565H01L23/49805H01L23/49816H01L24/81H01L24/97H01L25/105H01L2224/13144H01L2224/13147H01L2224/16H01L2224/32225H01L2224/48091H01L2224/48227H01L2224/48465H01L2224/48472H01L2224/73265H01L2224/81801H01L2224/97H01L2924/01029H01L2924/01032H01L2924/01046H01L2924/01079H01L2924/01082H01L2924/07802H01L2924/09701H01L2924/15311H01L2924/15331H01L24/48H01L2924/01033H01L2924/01087H01L2924/014H01L21/782H01L2924/3511H01L2225/1023H01L2225/1058H01L2224/16225H01L24/96H01L2224/83H01L2224/85H01L2224/81H01L2924/00014H01L2924/00H01L2924/00012H01L2924/181H01L2924/12042H01L24/73H01L2924/14H01L2224/0558H01L2224/05009H01L2224/0557H01L2224/05001H01L2224/05147H01L2224/05644H01L2224/05664H01L2924/1815H01L2224/05571H01L2224/05099H01L2224/45099H01L2224/45015H01L2924/207
Inventor GERBER, MARK A.WALTER, DAVID N.
Owner TEXAS INSTR INC
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