Coating device having coated transmitter coil

Abstract

A device, for depositing a layer on a substrate by supplying one or more process gases to a process chamber, includes a susceptor and one or more transmitter coils. The susceptor bearing the substrate can be heated to a process temperature by means of an electromagnetic alternating field generated by the one or more transmitter coils. The one or more transmitter coils have a coating that consists of tin and nickel in order to provide a corrosion-resistant coating, which simultaneously has low emissivity and is therefore effective in the presence of chlorine compounds and moisture.

Description

RELATED APPLICATIONS

[0001] This application is a National Stage under 35 USC 371 of and claims priority to International Application No. PCT / EP2018 / 067947, filed 3 Jul. 2018, which claims the priority benefit of DE Application No. 20 2017 104 061.5, filed 7 Jul. 2017.FIELD OF THE INVENTION

[0002] The invention relates to a device for depositing a layer on a substrate by supplying one or a plurality of process gases into a process chamber, in which a susceptor bearing the substrate can be heated to a process temperature by means of an electromagnetic alternating field generated by one or a plurality of transmitter coils, wherein the one or a plurality of transmitter coils have a coating.BACKGROUND

[0003] A device of this type is described in DE 10 2010 016 471 A1. A process chamber, in which a susceptor consisting of an electrically conductive material, on which a substrate rests, is located in a housing, which is sealed in a gas-tight manner relative to the environment. Reactive process ...

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