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Active matrix LCD device with image signal lines having a multilayered structure

a multi-layered structure and active matrix technology, applied in non-linear optics, instruments, optics, etc., can solve the problems of increasing the probability of wiring faults, reducing the manufacturing cost of tft substrates, etc., to achieve high aperture ratio, high production yield, and large screen size

Inactive Publication Date: 2007-08-28
PANASONIC LIQUID CRYSTAL DISPLAY CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

"The present invention provides a liquid-crystal display device and a manufacturing method that can decrease the number of processes and improve production yield. Additionally, the invention provides a storage capacitor that can vary its capacitance during the driving of a scanning signal bus-line, which can improve the display quality and resolution of the device."

Problems solved by technology

A large problem to be solved in order to realize a liquid-crystal display device of active matrix type is to decrease its manufacturing cost, and more particularly to decrease the manufacturing cost of the TFT substrate.
Therefore, when the drain electrode or the source electrode is not formed in a normal pattern, it increases the probability of the occurrence of wiring faults where both electrodes and the gate electrode short-circuit along the side surface of island-shaped pattern.
This leads to a disadvantage in that a break in the wire is apt to occur at the step near the pattern.
However, since the storage capacitor Cadd is connected to the scanning signal bus-line, it is difficult to perform high speed scanning.
Therefore, there is a disadvantage in that it is difficult to realize a high resolution and large screen display.

Method used

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  • Active matrix LCD device with image signal lines having a multilayered structure
  • Active matrix LCD device with image signal lines having a multilayered structure
  • Active matrix LCD device with image signal lines having a multilayered structure

Examples

Experimental program
Comparison scheme
Effect test

embodiment 1

(Embodiment 1)

[0071]FIG. 1 is a cross-sectional view showing the structure of the matrix portion (display portion) of a display panel in a liquid-crystal display device of active matrix type according to the present invention. This display panel comprises a TFT substrate 10 having on one side surface of a first insulator substrate 100 made of a transparent glass plate or the like thin film transistors TFT, pixel electrodes EP, various kinds of wiring and so on, a counter substrate 20 having on one side surface of a second insulator substrate 200 made of another transparent glass plate or the like counter electrodes EC, a color filter 204, a shielding film 203, and a liquid-crystal layer 300 filled between the both substrates facing to each other.

[0072]The elector-optical state of the liquid-crystal layer 300 between the pixel electrode EP and the counter electrode EC is controlled by applying an image signal voltage between the both electrodes to change the light transferring state ...

embodiment 2

(Embodiment 2)

[0134]The second embodiment according to the present invention will be described, referring to FIG. 18.

[0135]FIG. 18 is a cross-sectional view showing two image signal bus-lines Y adjacent to each other and in area therebetween, and corresponds to FIG. 4 in Embodiment 1.

[0136]The different point in this embodiment from Embodiment 1 is that the conductive film g made of Cr is not provided under the image signal bus-line Y, the image signal bus-line Y being constructed by forming an insulating film 104 made of silicon nitride and an i-type semiconductor layer 105 directly on a silicon oxide 101 formed on a transparent glass substrate 100 in nearly the same pattern, further successively laminating on it an n+-type semiconductor layer 106, a first conductive film d1 made of metal silicide (MoSi in this embodiment) and a second conductive film d2 made of ITO transparent conductive film. The first conductive film d1 is a metal silicide formed on the n+-type semiconductor lay...

embodiment 3

(Embodiment 3)

[0148]The third embodiment according to the present invention will be described, referring to FIG. 19 and FIG. 20. FIG. 19 is a cross-sectional view showing two image signal bus-lines Y adjacent to each other and an area therebetween, and corresponds to FIG. 4 in Embodiment 1. FIG. 20 is a view showing one process among the manufacturing processes for the liquid-crystal display device according to the present invention and a cross-sectional view showing a thin film transistor TFT and a gate terminal GTM portion. This figure corresponds to FIG. 14 in Embodiment 1.

[0149]In Embodiment 1, the first conductive layer d1 made of MoSi film is formed on the upper portion of the n+-type semiconductor layer 106 and the side surface of the i-type semiconductor layer 105 (FIG. 4, FIG. 14). In this embodiment, the first conductive layer d1 is formed only on the upper portion of the n+-type semiconductor layer 106 and not formed on the side surface of the i-type semiconductor layer 1...

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Abstract

A liquid crystal display device and a manufacturing method therefor are provided where the number of processes for manufacturing TFT substrates can be decreased and a high production yield can be attained. To attain these objects, an image signal bus-line includes at least a transparent conductive film and a semiconductor layer. A pattern of the transparent conductive film extends up to a thin film transistor to form its drain electrode, and a pattern of a semiconductor layer extends up to the transistor to form its source electrode. By virtue of these arrangements, the thin film transistor substrate can be manufactured using as little as three or four photolithography processes.

Description

BACKGROUND OF THE INVENTION[0001]The present invention relates to a liquid-crystal display device of active matrix driving type utilizing thin film transistors (hereinafter referred to as “TFT”) and a manufacturing method therefor.[0002]The liquid crystal display device of active matrix type is a display device in which a switching element is provided in each of plural pixel electrodes arrayed on a display panel in matrix-shape. The liquid crystal display device of active matrix type is capable of displaying images with better contrast than a liquid-crystal display device of simple matrix type employing a time sharing driving method, and the active matrix driving method is an indispensable technique for color display.[0003]A conventional liquid crystal display device of active matrix type comprises a first insulator substrate (TFT substrate) having on one side of the surfaces a plurality of scanning signal bus-lines spaced at a given distance extending in a first direction, a plural...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): G02F1/136G02F1/1343H01L29/04H01L31/036G02F1/1362G02F1/1368H01L21/336H01L29/45H01L29/78H01L29/786
CPCG02F1/136286H01L29/458G02F1/1362
Inventor ONO, KIKUOOGAWA, KAZUHIROSUZUKIANNO, KOUICHISAKUTA, HIROKITSUMURA, MAKOTOKITAJIMA, MASAAKIKAWACHI, GENSHIRO
Owner PANASONIC LIQUID CRYSTAL DISPLAY CO LTD