The utility model provides a slow-pulling inclined driving device and a cleaning
machine, which belong to the field of
silicon wafer production and
processing, and comprise a slow-pulling lifting frame, an inclined supporting seat, a lifting driving mechanism, a basket positioning and guiding unit and an inclined limiting
assembly, the two longitudinal ends of the inclined supporting seat are pivotally mounted above the two ends of the flat frame of the slow-pulling lifting frame through an inclined rotating shaft
assembly; the lifting driving mechanism adopts a non-belt transmission mode, and the driving end is connected to vertical frames at the two ends of the slow-pull lifting frame. And a plurality of flower basket positioning and guiding units are arranged on the inclined supporting seat. According to the movement mechanism integrating lifting and
lateral deviation inclination,
residual moisture on the surface of a cleaned
silicon wafer is reduced, the
drying effect is improved, the slow-pull inclined driving device is integrally driven by a motor lead screw, the problems of easy aging and slipping caused by belt driving are solved, an independent positioning and guiding unit is arranged corresponding to each material basket or basket, positioning and guiding are facilitated, and the
drying efficiency is improved. And therefore, the integral
silicon wafer perfectness ratio is improved, and the silicon wafer cleaning device is convenient to popularize and apply in the fields of silicon wafer cleaning and the like.