Process for manufacturing molybdenum disc by molybdenum blank rolling method
A calendering method and wafer technology, which is applied in the processing field of producing molybdenum wafers, can solve the problems of short service life, stability, fatigue resistance, bending strength, poor tensile performance, uneven distribution of device current and voltage, etc. Uniform particle distribution, long service life and good stability
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Embodiment 1
[0016] Embodiment 1, molybdenum billet calendering method system molybdenum disc technology, is made up of following steps:
[0017] 1) Hot rolling of molybdenum billet. The molybdenum billet is heated and rolled at 1470±50°C for 60-70 minutes, and heated and rolled at 1250±50°C for 40-45 minutes for the second time. The heating protection atmosphere of the second rolling is hydrogen.
[0018] 2) Heating and brewing. The molybdenum sheet is punched after being heated at 600±50°C for 60±10 minutes.
[0019] 3) Coarse grinding.
[0020] 4) Annealing. After the molybdenum disc blank is kept at 800-1000°C for 60±10 minutes, it is slowly and naturally cooled to eliminate stress.
[0021] 5) Machining. After annealing, the molybdenum wafers undergo machining processes such as fine grinding, edge turning, grinding, and edge finishing.
[0022] 6) Surface treatment. It is used to clean oil stains and vacuum traces on the surface of molybdenum discs. The cleaning solution is a m...
Embodiment 2
[0023] Embodiment 2, molybdenum billet calendering method system molybdenum disc technology, with reference to embodiment 1, wherein:
[0024] The fine grinding in the machining adopts the vacuum fine grinding method, and the vacuum plate is magnetically equipped on the surface grinder to attract the molybdenum disc, that is, under the suction of the vacuum pump, the molybdenum disc is sucked firmly on the vacuum pole. In the position of the plate, the vacuum plate is magnetically attracted by the worktable of the surface grinder to carry out the fine grinding process.
[0025] The cleaning solution for the surface treatment of the machined molybdenum disc is a mixed solution made of 30% hydrogen peroxide, ammonia water and clear water in a weight ratio of 3:1:6.
Embodiment 3
[0026] Embodiment 3, molybdenum billet calendering method system molybdenum disc technology, with reference to embodiment 2, wherein the surface treatment of the molybdenum disc after machining is that molybdenum disc is placed in aqua regia and soaked repeatedly 5-6 times, each time is 5-6 times. 8 seconds, then rinse with water and wipe dry.
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