Method for trace analysis and analyzer therefor
A technology of trace components and analysis methods, applied in the direction of measuring devices, analysis materials, material separation, etc., can solve the problems of residual fluorine gas, useless, fluorine fixation, etc.
Inactive Publication Date: 2009-02-04
RESONAC HOLDINGS CORPORATION
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Problems solved by technology
However, in the method (1), in order to directly introduce fluorine gas into the separation column, the packing material that can be used is limited to the packing material that does not react with fluorine, and in such packing material, there is no material for separating fluorine gas. and other components such as oxygen, so there is a problem of not being able to analyze components that cannot be separated
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[0054] Hereinafter, the present invention will be described in more detail by way of examples, but the present invention is not limited to these examples.
[0055] After filling the sample container with fluorine gas generated by a fluorine generator Effigyene (manufactured by Showa Denko Co., Ltd.), neon (Ne) gas was further filled so that the fluorine concentration became 3% by volume, thereby preparing a sample gas.
[0056] The above-mentioned sample gas and hydrogen gas are respectively supplied through a mass flow controller, and the molar ratio of the hydrogen gas to the fluorine gas in the sample gas is doubled, and they are mixed at the inlet of the reaction tube of the fluorine gas and the hydrogen-containing substance, And it introduced into the reaction tube which heated with the heater and kept at 150 degreeC. Potassium iodide (KI) aqueous solution is absorbed reaction tube exit gas, uses sodium thiosulfate aqueous solution titration, carries out the analysis of u...
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The present invention provides a method for analyzing trace components contained in a mixed gas containing fluorine gas easily and simply with high precision and an analyzer therefor. A method for trace analysis, characterized by reacting (i) a mixed gas which comprises fluorine gas and a diluent gas and contains trace components with (ii) a hydrogen-containing substance to convert the fluorine gas into hydrogen fluoride, removing the hydrogen fluoride through fixation, and then analyzing the trace components by gas chromatography; and an analyzer for trace components which comprises a reactor tube forreacting (i) a mixed gas which comprises fluorine gas and a diluent gas and contains trace components with (ii) a hydrogen-containing substance, a tube filled with an alkali metal fluoride, a gas sampler composed of a six-way changeover valve capable of changing the flow channel of a carrier gas and a sample measuring tube capable of preparing a certain amount of a sample that is connected to the valve, and a gas chromatograph and which is piped so that the mixed gas and the hydrogen-containing substance can flow in this order.
Description
technical field [0001] The present invention relates to a method for analyzing trace components contained in a mixed gas containing fluorine gas, and in more detail, relates to a simple and high-precision analysis of oxygen in a mixed gas composed of fluorine gas and diluent gas and containing trace components , nitrogen, carbon monoxide, carbon dioxide, other trace components method and its analysis device. Background technique [0002] As an analysis method of trace components contained in fluorine gas, it has been known for a long time: (1) Gas chromatography using corrosion resistance such as nickel, monel alloy, fluororesin, fluorine oil, etc. in the part contacting fluorine gas The method for analyzing, and (2) passing fluorine gas into the metal fluoride filling layer to form a higher metal fluoride for immobilization and removal, and then adopting a gas chromatograph for analysis (Japanese Patent Application Laid-Open Publication No. 7-287001 (Patent Document 1)) et...
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IPC IPC(8): G01N30/14G01N30/06G01N30/88
CPCG01N30/14G01N30/88G01N2030/8859G01N2030/025
Inventor 酒井雄二大野博基
Owner RESONAC HOLDINGS CORPORATION