Electrode substrate of two-dimensional display
A technology for flat-panel displays and electrode substrates, applied in electric light sources, electrical components, printed circuits, etc., can solve problems such as poor resistance, low process yield, poor oxidation resistance or adhesion, and improve product quality. The effect of high efficiency and reliability, good conductivity and low resistance value
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Embodiment 1
[0025] Embodiment 1 Copper-nickel-zinc alloy is sputtered on a flat-panel display to form a protective layer of conductive patterns (electrode layer and wire layer)
[0026] refer to figure 1 , put the copper-nickel-zinc alloy target into a sputtering chamber, and place a flat-panel display substrate 10 in the sputtering chamber. The wire pattern 12 has been pre-formed on the substrate, and then the argon gas with a flow rate of 20 sccm is introduced, and the 200W DC power, the sputtering chamber is maintained at a vacuum of 5 mtorr for 1.5 minutes to form a layer with a thickness of 1300 on the wire pattern 12 The protective layer 14, the protective layer 14 has been tested by oxygen plasma to obtain good oxidation resistance, and after the 85°C / RH85% high-temperature and high-humidity test, the peeling test (peeling test) with adhesive tape can obtain good adhesion gender verification.
Embodiment 2
[0027] Embodiment 2 Copper-nickel-zinc alloy is sputtered on a flat-panel display to form a conductive pattern (electrode layer and wire layer)
[0028] refer to figure 2 , put the copper-nickel-zinc alloy target into a sputtering chamber, and place a flat-panel display substrate 20 in the sputtering chamber, then pass in argon gas with a flow rate of 20sccm, and maintain a vacuum of 5mtorr in the sputtering chamber with a DC power of 100W Sputtering for 1 minute at a temperature of 1100°C forms a layer on the substrate 20 with a thickness of 1100 The conductive wire pattern 22, the conductive wire pattern 22 has been tested by oxygen plasma to obtain good oxidation resistance, and after the 85°C / RH85% high-temperature and high-humidity test, the stripping test with adhesive tape can be used to verify good adhesion.
[0029] The electrode substrate of the present invention uses copper-nickel-zinc alloy to form a protective layer with good oxidation resistance and high adhes...
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