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Electrode substrate of two-dimensional display

A technology for flat-panel displays and electrode substrates, applied in electric light sources, electrical components, printed circuits, etc., can solve problems such as poor resistance, low process yield, poor oxidation resistance or adhesion, and improve product quality. The effect of high efficiency and reliability, good conductivity and low resistance value

Inactive Publication Date: 2009-03-04
RITDISPLAY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Although silver or silver alloys are currently used as wire or electrode materials for flat-panel displays, although they have good electrical conductivity, they are not resistant to oxidation or adhesion, and are not resistant to atmospheres such as sulfur, ammonia, chlorine, and oxygen. Good, easy to lead to low process yield

Method used

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  • Electrode substrate of two-dimensional display
  • Electrode substrate of two-dimensional display

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Embodiment 1 Copper-nickel-zinc alloy is sputtered on a flat-panel display to form a protective layer of conductive patterns (electrode layer and wire layer)

[0026] refer to figure 1 , put the copper-nickel-zinc alloy target into a sputtering chamber, and place a flat-panel display substrate 10 in the sputtering chamber. The wire pattern 12 has been pre-formed on the substrate, and then the argon gas with a flow rate of 20 sccm is introduced, and the 200W DC power, the sputtering chamber is maintained at a vacuum of 5 mtorr for 1.5 minutes to form a layer with a thickness of 1300 on the wire pattern 12 The protective layer 14, the protective layer 14 has been tested by oxygen plasma to obtain good oxidation resistance, and after the 85°C / RH85% high-temperature and high-humidity test, the peeling test (peeling test) with adhesive tape can obtain good adhesion gender verification.

Embodiment 2

[0027] Embodiment 2 Copper-nickel-zinc alloy is sputtered on a flat-panel display to form a conductive pattern (electrode layer and wire layer)

[0028] refer to figure 2 , put the copper-nickel-zinc alloy target into a sputtering chamber, and place a flat-panel display substrate 20 in the sputtering chamber, then pass in argon gas with a flow rate of 20sccm, and maintain a vacuum of 5mtorr in the sputtering chamber with a DC power of 100W Sputtering for 1 minute at a temperature of 1100°C forms a layer on the substrate 20 with a thickness of 1100 The conductive wire pattern 22, the conductive wire pattern 22 has been tested by oxygen plasma to obtain good oxidation resistance, and after the 85°C / RH85% high-temperature and high-humidity test, the stripping test with adhesive tape can be used to verify good adhesion.

[0029] The electrode substrate of the present invention uses copper-nickel-zinc alloy to form a protective layer with good oxidation resistance and high adhes...

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PUM

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Abstract

The invention relates to an electrode base plate of plate display, which comprises a base plate, an electrode layer, a wire layer and a protective layer. Wherein, the electrode layer and the wire layer are on the base plate; the protective layer is above the electrode layer and / or wire layer; the protective layer at least comprises copper (Cu), nickel (Ni), and zinc (Zn), while copper is 50-80mass%, nickel is 5-20mass%, and zinc is 15-30mass%, while the total mass percentage is 100%.

Description

technical field [0001] The present invention relates to an electrode substrate of a flat panel display, especially an electrode substrate using a copper-nickel-zinc alloy to form a conductive pattern (wire, electrode or auxiliary electrode) and / or a protective layer on the flat panel display, so as to enhance its resistance Oxidation and adhesion to improve product yield and reliability. Background technique [0002] Flat panel displays (such as Liquid Crystal Display (LCD), Organic Electroluminescent Display (OELD), etc.) have gradually replaced cathode ray tube displays as the focus of displays due to their light, thin, and small features. [0003] Organic electroluminescent display is a technology that utilizes the self-luminous properties of organic functional materials to achieve display effects. It can be divided into small molecule organic electroluminescent displays (small molecules) according to the molecular weight of organic functional materials. Molecule OELD, S...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05K1/02H05K1/00H05B33/12
Inventor 张毅黄添旺曾雍益
Owner RITDISPLAY