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Optical performance restoring equipment, restoring method

A technology of optical performance and recovery method, applied in the field of invention, can solve problems such as difficulty in long-term monitoring

Inactive Publication Date: 2009-12-30
MITSUBISHI HEAVY IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, it is difficult to use this lamp for occasions that require long-term monitoring such as environmental measurements

Method used

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  • Optical performance restoring equipment, restoring method
  • Optical performance restoring equipment, restoring method
  • Optical performance restoring equipment, restoring method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0134] figure 1 is a schematic diagram showing the structure of a microwave-excited hydrogen ultraviolet lamp according to the first example of the first preferred embodiment of the present invention.

[0135] The holder (flange) 17 to which the light transmission window 8 is connected is disc-shaped and its center is aligned with the hole of the discharge tube 1, which includes an opening having a diameter larger than the inner diameter of the discharge tube. The window flange 17 includes an O-ring groove to create a seal over the entire opening of the light transmission window 8, and a hollow cover-like mounting bracket 20, for attaching its bolt holes, and for connection to the discharge vessel 1 for use with the window flange. 17 O-ring grooves to maintain vacuum.

[0136] The internal structure of the assembly frame 20 adopts two-stage concentric circles and limits the space for accommodating the light transmission window 8 and the space surrounded by the discharge tube...

Embodiment 2

[0160] figure 2 is a schematic diagram showing a microwave-excited hydrogen ultraviolet lamp according to a second example of the first preferred embodiment of the present invention. Detailed descriptions of other structures and operating elements that are the same as those described in Embodiment 1 are omitted here. The specifications of the light transmission window 8 are the same as those described in Embodiment 1. In addition, a photodiode 12 is positioned as means for monitoring the light output of said lamp to receive the light output of light 9 emitted by the lamp.

[0161] Water vapor was supplied to the vacuum zone 14 and adjusted to a predetermined gas partial pressure by the method described below. A glass tube 24 (tube diameter Φ6 mm) filled with 1 mL of water 25 (pure water for distillation, ion exchange treatment and filtration) is connected to the tube 16d through the flange 17 . The construction of the flange 17 combined with an O-ring seals the glass tube ...

Embodiment 3

[0172] image 3 is a schematic diagram showing a microwave-excited hydrogen ultraviolet lamp according to a third example of the first preferred embodiment of the present invention. Detailed descriptions of other structures and operating elements that are the same as those described in Embodiment 1 are omitted here. The specifications of the light transmission window 8 are the same as those described in Embodiment 1. In addition, a photodiode 12 as means for monitoring the light output of said lamp is positioned to receive the light output of light 9 emitted by the lamp.

[0173] Atmospheric components are supplied to the vacuum zone 14 and adjusted to a prescribed gas partial pressure by the method specified below.

[0174]After the orifice is adjusted by the variable leak valve 19, the atmospheric component is fed to the vacuum zone 14 through a tube open to atmosphere allowing the atmospheric component to flow through tube 16b, and through a sealing mechanism (not shown) ...

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Abstract

The invention relates to an optical device which can prevent or depress the wane of optical system which designed the life of optical device. It can achieve the effect such as optical transmission, optical diffraction, optical reflection, spectrum generation, optical impulsion and its combination. It has the following steps: generating near-empty space with active energy to excite the oxidizing reaction of carbon, wherein the said near-empty space is opposed faced to the surface of optical system; the said near-empty space generates negative ion or group such as unstable group with oxygen atom like OH group, OH.-. ion, ozone, O.2..-. ion and O.-. group.

Description

technical field [0001] The present invention relates to an apparatus and method for improving the reliability and lifetime of the optical performance of an optical system by preventing, suppressing or improving the attenuation of the optical performance of the optical system present at or along the ray path of an output ray , wherein the optical system is set in a near-vacuum region where organic components can decompose, and the attenuation is achieved by depositing or accumulating on the light-irradiating surface, light-reflecting surface, and light-emitting surface (collectively referred to as "light surface") of the optical system Carbon is generated on the surface while the surface faces the vacuum region. More specifically, it relates to an optical performance restoration device and a method of using the same, which is used to improve the settings for generating light transmission, refraction, reflection, etc. The optical properties of various optical systems outside th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B7/00C03C23/00H01J61/00G03F7/20H01L21/027
Inventor 坂井智嗣鹤我薰典山越英男栗林志头真团野实二见博山崎纪子
Owner MITSUBISHI HEAVY IND LTD
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