Method for plating diamond film on surface of stainless steel metal

A diamond thin film, metal surface technology, applied in metal material coating process, sputtering plating, ion implantation plating and other directions, can solve the problems of high internal stress, poor matching, etc., to prolong the wear resistance life and simple process Effect

Inactive Publication Date: 2007-12-05
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the diamond-like carbon (DLC) film itself has high internal stress and poor matching with metal materials, especially stainless steel. )film

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] 1. Fix the processed metal workpieces made of 1Cr18Ni9Ti on the workpiece turntable in the vacuum chamber of the arc ion coating equipment and vacuumize. The vacuum degree is better than 5×10 -3 Pa;

[0022] 2. Introduce argon gas and keep the vacuum degree stable at 3.2×10 -3 Pa, turn on the ion source to activate the metal surface, the working voltage of the ion source is 3.0kV, and the working time is 30min;

[0023] 3. Turn off the argon gas, load a negative bias voltage of -800V between the metal workpiece and the vacuum chamber, and turn on the titanium arc source to deposit a titanium transition layer on the surface of the metal workpiece. The working current of the titanium arc source is 90A, and the working time is 2min;

[0024] 4. Introduce nitrogen and keep the vacuum stable at 1.0×10 -2 Pa, turn on the graphite arc source so that the initial discharge frequency of the graphite arc source is 16 Hz, and increase the discharge frequency by 8 Hz for every 100...

Embodiment 2

[0027] 1. Fix the processed metal workpieces of 9Cr18 and 40Cr respectively on the workpiece turntable in the vacuum chamber of the arc ion coating equipment and vacuumize. The vacuum degree is better than 5×10 -3 Pa;

[0028] 2. Introduce argon gas and keep the vacuum degree stable at 4.9×10 -3 Pa, turn on the ion source to activate the metal surface, the working voltage of the ion source is 2.0kV, and the working time is 30min;

[0029] 3. Turn off the argon gas, load a negative bias voltage of -1500V between the metal workpiece and the vacuum chamber, and turn on the titanium arc source to deposit a titanium transition layer on the surface of the metal workpiece. The working current of the titanium arc source is 55A, and the working time is 10min;

[0030] 4. Introduce nitrogen gas and keep the vacuum degree stable at 1.1×10 -2 Pa, turn on the graphite arc source so that the initial discharge frequency of the graphite arc source is 16 Hz, and increase the discharge freque...

Embodiment 3

[0033] 1. Fix the processed metal workpiece made of Cr12 on the workpiece turntable in the vacuum chamber of the arc ion coating equipment and vacuumize it. The vacuum degree is better than 5×10 -3 Pa;

[0034] 2. Introduce argon gas and keep the vacuum degree stable at 3.7×10 -3 Pa, turn on the ion source to activate the metal surface, the working voltage of the ion source is 2.50kV, and the working time is 20min;

[0035] 3. Turn off the argon gas, load a negative bias voltage of -1000V between the metal workpiece and the vacuum chamber, and turn on the titanium arc source to deposit a titanium transition layer on the surface of the metal workpiece. The working current of the titanium arc source is 75A, and the working time is 5min;

[0036] 4. Introduce nitrogen and keep the vacuum stable at 1.3×10 -2 Pa, turn on the graphite arc source so that the initial discharge frequency of the graphite arc source is 16 Hz, and increase the discharge frequency by 8 Hz for every 2000 ...

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Abstract

The present invention discloses process of plating diamond-like coating onto the surface of stainless steel, and features the adoption of pulse arc ionic plating technology. The diamond-like film plating process includes the following steps: activating ion in the surface of the metal workpiece, plating one transition titanium layer, plating one transition titanium carbide layer, and plating diamond-like coating on the transition titanium carbide layer. The present invention has raised adhesion of diamond-like coating, increased thickness and service life of the diamond-like coating and simple technological process, and is especially suitable for surface antiwear treatment of precise metal parts of 1Cr18Ni9Ti, Cr12, 9Cr18, 40Cr and other stainless steel.

Description

technical field [0001] The invention relates to the surface treatment of metal materials, in particular to a method for plating a diamond-like film on the surface of stainless steel metal. Background technique [0002] Diamond-like carbon (DLC) film is one of the main materials for surface treatment to improve the wear life of relative contact moving parts due to its high hardness, low friction coefficient and chemical inertness. However, the diamond-like carbon (DLC) film itself has high internal stress and poor matching with metal materials, especially stainless steel. )film. Contents of the invention [0003] The purpose of the present invention is to provide a kind of method that the diamond-like carbon film is plated on the stainless steel metal surface for the deficiencies in the prior art, it has improved the metal material matching property of the diamond-like carbon (DLC) film and stainless steel, suitably reduces deposition The internal stress of the diamond-li...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C28/00C23C14/22C23C14/06C23C14/52C23C16/34C23C16/50C23C16/52
Inventor 马占吉赵栋才任妮武生虎肖更竭
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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