Variable focal length X-ray compound lens and manufacturing method thereof

Abstract

The present invention belongs to the field of the optical technology and relates to a varifocal X-ray combination lens and its manufacture method. This combination lens consists of a lens main body and air cavities arranged on the lens main body at intervals; the material of the lens main body is PMMA. The manufacture method of the present invention is firstly making in turn the required lays of polyimide, metal film, optical resist, etc. on the surface of the monocrystal line silicon chip which plays the role of support; secondly performing the processes of photoetching, electroforming, removing of photoresist, windowing, and so on, then completing the preparation of the photomask used in photoetching the lens main body and the photomask used in photoetching the air cavities; Finally, performing two times of the X-ray photoetching using the prepared photomasks, thus finishing the manufacture of the varifocal X-ray combination lens. The present invention has the advantages of good focusing effect, slight scattering, high transmission of the X-ray radiation, simple technics, and so on.

Description

Technical field: [0001] The invention belongs to the field of optical technology, and relates to a microstructure X-ray optical element, in particular to a variable focal length X-ray combination lens and a manufacturing method thereof. Background technique: [0002] The X-ray combination lens is a new type of microstructure X-ray optical element proposed by Snigirev in 1996, which is especially suitable for high-energy X-ray bands (above 5keV). Since the device was proposed, foreign research on it has been very active. At present, combined refractive lenses have proved to have great advantages: they can focus high-energy X-rays, have high focusing efficiency, do not need to refract the optical path, are easy to arrange and operate, have good high temperature stability and are easy to cool, and can eliminate spherical aberration, etc. . In recent years, researches on various applications based on X-ray combined lens focusing and collimation are very active. Examples inclu...

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Problems solved by technology

Since this combination lens uses Al material with low price and adopts molding technology to obtain the parabolic shape, it has the following disadvantages: low processing accuracy, which affects the focusing effect; the distance between two adjacent air cavities is large, which affects X-ray radiation Transmittance; high surface roughness increases scattering; complex process

And this combination lens can only achieve continuous zoom because the height of the air cavity changes continuously

At present, there are few researches on X-ray combination lens in China

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