Gas sensor and method for manufacturing the same

A technology of a gas sensor and a manufacturing method, which is applied to the structural details of gas analyzers, analysis of gas mixtures, instruments, etc., can solve problems such as insufficient responsiveness of stability over time, and achieve excellent energy-saving effect, deterioration over time, and high efficiency. The effect of measuring sensitivity

Inactive Publication Date: 2008-03-05
SUMITOMO ELECTRIC IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, such a gas sensor using a mixture of a metal oxide such as tin oxide and metal carbonyl oxide or metal carbonyl oxyhydride for the detection electrode is still insufficient in terms of age-based stability and responsiveness.

Method used

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  • Gas sensor and method for manufacturing the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0089] By vapor deposition at 10cm 2 1. A film-like substance of gold with a thickness of 0.1 μm is formed on the entire surface of a quartz glass substrate 9 with a thickness of 0.5 mm. Conductive substance film6.

[0090] Then, in an area of ​​2mm 2 A film-like material of lithium cobaltate with a thickness of 6 μm is formed on a part of the electronically conductive material film 6, and the part of the electronically conductive material film 6 corresponds to the 5 mm area on the back surface of the substrate 9 by laser ablation through the mask. 2 The central notch, thereby forming the reference material film 5. More specifically, lithium cobalt oxide powder molded into pellets by a mold is set in a vacuum container as a laser target, and a substrate 9 formed with an electronically conductive substance film 6 is set in a substrate holder in the vacuum container (substrate holder). Then, at 10 -3 A KrF excimer laser beam (eXcimer laser beam) was applied to the target un...

Embodiment 2～7

[0102] The gas sensors of Examples 2 to 7 were prepared under the same conditions as in Example 1, except that in order to change the ion conductivity level, La was changed as shown in Table 1. (2 / 3)-X Li 3X TiO 3 The Li content of the film (chemical formula La (2 / 3)-X Li 3X TiO 3 X in Table 1), and under the same conditions as in Example 1, the lithium ion migration number and sensor output were measured. Table 1 shows the results.

[0103] Table 1

[0104] La (2 / 3)-X Li 3X TiO 3 film

[0105] As can be understood from the results shown in Table 1, the gas sensors of Examples 2, 3 and 4 having X values ​​in the range of 0.05 to 0.15 exhibited high levels of ion conductivity and particularly high output.

Embodiment 8～10

[0107] The gas sensors of Examples 8 to 10 were prepared under the same conditions as in Example 1, except that the reference substances shown in Table 2 were used, and the outputs of these gas sensors were measured under the same conditions as in Example 1. Table 2 shows the results. As can be understood from Table 2, the gas sensor obtained a high output regardless of the type of the reference substance.

[0108] Table 2

[0109] Reference substance

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Abstract

With a gas sensor comprising a structure including a reference pole having a reference material and an electronic conductive material and a sensing pole having a sensing material and an electronic conductive material provided through a solid electrolyte in which the said solid electrolyte, the said reference material and the said sensing material are constituted of lithium ionic conductors and a method of manufacturing the same, an equilibrium potential gas sensor employing a solid electrolyte operable at a low temperature not more than 200 DEG C, particularly at the room temperature, not influenced by moisture or the like and excellent in age-based stability with high measurement sensitivity as well as high responsibility and a method of manufacturing the same can be provided.

Description

technical field [0001] The present invention relates to a gas sensor and a manufacturing method thereof. More particularly, the present invention relates to an equilibrium potential gas sensor using a gas sensor capable of measuring atmospheric carbon dioxide ( CO 2 ) solid electrolyte of equal concentration. Background technique [0002] To measure atmospheric carbon dioxide (CO 2 ), a gas sensor having a sensing pole (working electrode) and a reference pole (reference electrode) provided by a solid electrolyte has been proposed. This is an equilibrium potential gas sensor that measures gas concentration by an eletromotive force generated between a detection pole and a reference pole, the amount of which varies with the amount of gas dissolved into the detection pole. Regarding this gas sensor, various types of preferable materials and structures have been proposed for the detection electrode, reference electrode, and solid electrolyte, respectively. [0003] For examp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/407G01N27/416
CPCG01N33/004G01N27/4074Y10T29/49174
Inventor 太田进启
Owner SUMITOMO ELECTRIC IND LTD
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