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Substrate processing device and method

A substrate processing device and technology for substrates, which are applied in chemical instruments and methods, special processing targets, cleaning methods and utensils, etc., can solve problems such as difficulty in size and inability to provide large quantities of sizes.

Inactive Publication Date: 2008-04-02
DAINIPPON SCREEN MTG CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] However, the size of the microbubbles generated by the existing microbubble generating device has a deviation from a normal distribution centered on a given diameter, and it is difficult to control the size of the microbubbles.
Therefore, it is impossible to supply a large amount of microbubbles with an optimal size to the substrate to be supplied
For example, when microbubbles are used in the substrate cleaning process, it is not possible to provide a large amount of microbubbles with the optimum size for the particle size to be cleaned.
Therefore, the use of existing substrate processing equipment may not necessarily make the microbubbles effectively act on the substrate

Method used

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  • Substrate processing device and method
  • Substrate processing device and method
  • Substrate processing device and method

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Embodiment Construction

[0030] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

[0031]

[0032] FIG. 1 is a view schematically showing the overall structure of a substrate processing apparatus 1 of the present invention. The substrate processing apparatus 1 is an apparatus for cleaning the surface of a square glass substrate (hereinafter simply referred to as “substrate”) 9 for a liquid crystal display device and removing foreign matter such as organic matter or particles adhering to the substrate 9 . As shown in FIG. 1 , the substrate processing apparatus 1 mainly includes a UV processing unit 10 , a cleaning brush processing unit 20 , a replacement washing unit 30 , a microbubble cleaning processing unit 40 , and a rinsing processing unit 50 . Furthermore, the substrate processing apparatus 1 includes a plurality of transport rollers 60 for transporting the substrate 9 , and the substrate 9 is transported in the arrow AR ...

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Abstract

The invention provides a device for treating substrate and its processing method, which uses the processing liquid including the micro bubble and the nano micro bubble. A micro bubble cleaning processing portion adjusts the nitrogen flow infused into the feeding cleaning liquid to adjust the micro bubble size contained in the cleaning liquid. Thereof, the device can supply the micro bubble with an optimal size in a large scale corresponding to the particle size of the removed objects and makes the micro bubble act to the substrate effectively.

Description

technical field [0001] The present invention relates to a substrate processing apparatus and a substrate processing method for supplying a processing liquid to various substrates such as glass substrates for liquid crystal display devices, glass substrates for PDPs, semiconductor wafers, and glass / ceramic substrates for magnetic / optical discs to process the substrates. Background technique [0002] Conventionally, a substrate processing apparatus for processing a substrate by supplying a processing liquid onto the surface of the substrate in the manufacturing process of the substrate is well known. In particular, in recent years, attempts have been made to supply a treatment liquid containing microbubbles to the surface of a substrate in order to improve the treatment effect on the substrate. Using a treatment liquid containing microbubbles can efficiently remove, for example, fine particles adhering to the substrate. [0003] In such a conventional substrate processing app...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/00H01L21/02H01L21/30H01L21/306H01L21/67B08B3/02B08B7/04
CPCC02F2303/26G02F1/1303G02F1/1316H01L21/6704
Inventor 川根旬平盐田明仁铃木聪山本悟史
Owner DAINIPPON SCREEN MTG CO LTD
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