Self-lubricating abrasion-proof graphite//TiC gradient composite thin film

A composite film, self-lubricating technology, used in ion implantation plating, coating, layered products, etc., can solve the problem of mechanical control system reliability and service life reduction, sharp increase in vacuum environment, tribological stability Excellent and other problems, to achieve the effects of excellent chemical stability, improved interfacial adhesion, and excellent friction stability

Inactive Publication Date: 2008-07-02
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The traditional diamond-like carbon (DLC) film has high hardness and excellent wear resistance, but due to the large internal stress in the DLC film, the bonding force with most alloy substrates is not high (scratch test critical load 1.4GPa) or dynamic load
At the same time, the tribological properties of DLC films are more sensitive to environmental effects. For example, the friction coefficient of DLC films in humid air (relative humidity 50-80%) is 0.08-0.10, but it will increase sharply to 0.40-0.50 in a vacuum environment, and During operation, the friction coefficient will fluctuate greatly, and its tribological stability is far less than that in air
The friction and wear behavior of mechanical parts will have an important impact on the safety and reliability of the system. When the environmental conditions change from humid atmosphere to vacuum, the friction coefficient of this type of protective film coated on the surface of mechanical parts will change significantly. May result in reduced reliability and service life of machinery control systems

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0012] A closed-field unbalanced magnetron sputtering apparatus was used to sputter and deposit a gradient composite film. A high-purity graphite target and a metal Ti target are placed on four vertical to the horizontal and 90 degrees to each other to prepare a thin film by reactive sputtering. The No. 1 and No. 3 targets are graphite targets, and the No. 2 and No. 4 targets are Ti targets. The turret table on which the alloy specimen is placed rotates in a single axis around the vertical center, and the rotation speed of the turret table is controlled to 4 rpm. The specimen rotates at the same time, and the distance between the specimen and the target is 15cm. Before coating, pre-evacuate to 3.0×10 -4 Pa, followed by argon with a purity of 99.99%, and the flow of argon is controlled at 35 sccm. First, clean the target material with 0.4A target current and 500V bias voltage for 20 minutes, then apply 4.0A target current and 110V sputtering bias on the two graphite targets respect...

Embodiment 2

[0015] A closed-field unbalanced magnetron sputtering apparatus was used to sputter and deposit a gradient composite film. A high-purity graphite target and a metal Ti target are placed on four vertical to the horizontal and 90 degrees to each other to prepare a thin film by reactive sputtering. The No. 1 and No. 3 targets are graphite targets, and the No. 2 and No. 4 targets are Ti targets. The turret table on which the alloy specimen is placed rotates in a single axis around the vertical center, and the rotation speed of the turret table is controlled to 4 rpm. The specimen rotates at the same time, and the distance between the specimen and the target is 15cm. Before coating, pre-evacuate to 3.0×10 -4 Pa, followed by argon with a purity of 99.99%, and the flow of argon is controlled at 35 sccm. First, clean the target material with 0.4A target current and 500V bias voltage for 20 minutes, then apply 4.0A target current and 90V sputtering bias on the two graphite targets respecti...

Embodiment 3

[0018] A closed-field unbalanced magnetron sputtering apparatus was used to sputter and deposit a gradient composite film. A high-purity graphite target and a metal Ti target are placed on four vertical to the horizontal and 90 degrees to each other to prepare a thin film by reactive sputtering. The No. 1 and No. 3 targets are graphite targets, and the No. 2 and No. 4 targets are Ti targets. The turret table on which the alloy specimen is placed rotates in a single axis around the vertical center, and the rotation speed of the turret table is controlled to 4 rpm. The specimen rotates at the same time, and the distance between the specimen and the target is 15cm. Before coating, pre-evacuate to 3.0×10 -4 Pa, followed by argon with a purity of 99.99%, and the flow of argon is controlled at 35 sccm. First, clean the target material with 0.4A target current and 500V bias voltage for 20 minutes, then apply 4.0A target current and 70V sputtering bias on the two graphite targets respecti...

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Abstract

The invention discloses a self-lubrication and wearing-resistant graphite-like / TiC grads compound film. The invention has the technical proposal that a TiC layer with a thickness of 50 to 250nm and a graphite-like with a thickness of 100 to 500mm thickness are sequentially plated on an alloy surface: a TiC compound transition layer and a graphite-like layer with a thickness of 300 to 1250nm form the graphite-like / TiC grads compound film. The content weight percentages of the grads compound film are: 54 to 75 percent of graphite-like and 25 to 46 percent of TiC. A total thickness of the grads compound film is between 0.45 to 2.0 Mum. The grads compound film is provided with a high wearing-resistant capability, an excellent interface joining capability and load bearing capability, and has a low friction coefficient and excellent friction environment stability in both vacuum and atmosphere, etc. The invention can be applied to manufacturing self-lubrication and wearing-resistant films, universally used in the vacuum and atmosphere, etc., of surfaces of mechanical parts such as bearings, gyroscopes and mini-type rotary shafts, etc.

Description

Technical field [0001] The invention relates to a self-lubricating wear-resistant graphite / TiC gradient composite film. Background technique [0002] The traditional diamond-like carbon (DLC) film has high hardness and excellent wear resistance, but due to the large internal stress in the DLC film, the bonding force with most alloy substrates is not high (the critical load of the scratch test is less than 20N). The film is prone to cracking or peeling under high load (>1.4GPa) or dynamic load impact. At the same time, the tribological properties of DLC film are more sensitive to environmental effects. For example, the friction coefficient of DLC film in humid air (relative humidity 50-80%) is 0.08-0.10, but in a vacuum environment it will increase sharply to 0.40-0.50, and The friction coefficient will fluctuate greatly during operation, and its tribological stability is far less than excellent in air. The friction and wear behavior of mechanical parts will have an important i...

Claims

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Application Information

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IPC IPC(8): B32B15/04B32B33/00B32B9/00C23C30/00C23C14/35
Inventor 涂江平李瑞玲洪春福邬震泰
Owner ZHEJIANG UNIV
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