Contact probe and socket for testing semiconductor chips
A probe and chip testing technology, used in measurement devices, semiconductor/solid-state device testing/measurement, electronic circuit testing, etc., can solve the problems of difficult parts production and assembly, complex shapes, etc., and achieve the effect of easy production and simple structure
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[0057] The test probe device and its test socket of the present invention will be further described below in conjunction with the accompanying drawings.
[0058] 2 is a cross-sectional view of a test probe device according to an embodiment of the present invention, and FIG. 3 is a cross-sectional view and a front view of a plunger and a contact pin according to an embodiment of the present invention.
[0059] 4 and 5 are oblique views and front views of a test socket according to an embodiment of the present invention, and FIG. 6 is a bottom view and a partially enlarged view of an elastic plate according to an embodiment of the present invention.
[0060] As shown in FIG. 2 , the test probe device includes: a plunger 20 contacting a contact terminal of a test object 1 ; an elastic plate 10 ; and a contact pin 30 between which an elastic member can be combined.
[0061] The elastic plate 10 is made of a non-conductive material and has a flat plate shape, and has a through hole 1...
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