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NTC film heat sensitive resistance and its making method

A thin-film thermistor and thin-film technology, applied in the direction of resistors with negative temperature coefficients, etc., can solve the problems of difficult-to-chip components, long response time, poor dimensional accuracy, etc., and achieve short response time, small environmental pollution, high precision effect

Inactive Publication Date: 2008-08-13
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
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Problems solved by technology

[0005] The problem with bulk NTC thermistors is the long response time due to the high heat capacity
Due to the poor dimensional accuracy of components made by ceramic technology, it is not easy to make chip components; high-precision thermistors (resistance value deviation ≤ 1%) are machined, so the process is complicated

Method used

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  • NTC film heat sensitive resistance and its making method
  • NTC film heat sensitive resistance and its making method

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Embodiment Construction

[0025] See Figure 2 and Figure 3. The structure of the NTC thin film thermistor of the present invention includes an NTC thin film resistor body and internal electrodes and terminal electrodes 5 connected thereto. The internal electrode is an interdigital electrode 3 covering the NTC thin film resistor. The NTC thin film resistor is located on the aluminum oxide substrate 1 . NTC thermistor dimensions conform to 0805, 0603 or 0402 standard chip component dimensions.

[0026] The NTC thin film thermistor prepared by the present invention has the advantages of good long-term stability of the device, short response time and high precision, as shown in FIG. 4 .

[0027] The present invention also provides a kind of preparation method of NTC thin film thermistor, see Fig. 1, specifically, comprise:

[0028] (1) Preparation of NTC ceramic targets;

[0029] (2) In a vacuum and protective gas environment, sputter the NTC material onto the substrate to form a thin film;

[0030] (...

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Abstract

The present invention provides a thin-film thermosensitive resistor and the preparing method thereof and especially relates to the preparing for the thermosensitive material and the device. The invention comprises a resistor body and an internal electrode and an end electrode which are connected with the resistor body. The invention is characterized in that the resistor body is a NTC film. The invention has the beneficial effects of good technique repeatability of the device, less environmental pollution of the technique, long-term stability, short responsive time and high precision.

Description

Technical field: [0001] The invention relates to the field of sensitive materials and sensors, in particular to the fabrication of thermistor materials and devices. Background technique [0002] NTCR (Negative Temperature Coefficient Resistor) is a negative temperature coefficient resistor, also known as an NTC thermistor. NTC thermistors are usually transition metal oxide semiconductor ceramic materials, and the resistance decreases exponentially with the increase of temperature, which is an ideal temperature sensor material. There are many kinds of NTC thermosensitive materials, which can be divided into oxide system and non-oxide system according to the composition and structure of the material. The structure is spinel, fluorite, perovskite, rutile and other types. [0003] One of the main uses of NTC thermistors is as a temperature sensor. The resistance-temperature characteristic can convert a small temperature change into a change in resistance value, forming a large...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01C7/04
Inventor 杨传仁宋秀娟张继华陈宏伟
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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