Continuous production technology of ultra-pure methanol

Abstract

The invention relates to a method for continuously producing methanol with ultrahigh purity, which comprises mixing industry level methanol material and edta at 0.5-1 wt% of the methanol material in a pretreatment device, feeding filtered product into a distillation column, feeding the half finished product of the distillation column via a mixed anion and cathode exchange device, filtering the product via a nano-filtration device and feeding the product into a final product receiver. The column length of the mixed anion and cathode exchange device is 2-2.5m, the diameter is 0.15-0.2m and the volume ratio of the anion and cathode in the exchange column is 1:1.5-2, filtration pressure of the nano-filtration membrane in the nano-filtration device is 0.5-0.8MPa and the aperture of the nano-filtration membrane is 0.5-1.5nm. The single cathode content of inventive ultrahigh-purity methanol is lower than 1ppb, the single anion content is lower than 100ppb, and the dust particles larger than 0.5um is less than 5 / ml. The invention has reasonable process, simple device production, low cost, high product purity, low content of foreign ions and the application for large scale industrial production.

Description

Technical field [0001] The invention relates to an ultra-clean and high-purity chemical reagent, in particular to a process for the continuous production of ultra-high-purity methanol. Ultra-high purity methanol is mainly used for cleaning and corrosion in the manufacturing of large-scale integrated circuit semiconductor devices in the microelectronics industry. Background technique [0002] Ultra-clean and high-purity chemical reagents, also known as microelectronic chemicals, are key basic materials in the processing and manufacturing of the microelectronics industry, and are mainly used for cleaning and etching in the microprocessing of integrated circuits (IC). Its purity and cleanliness have a very significant impact on the yield, electrical performance and reliability of integrated circuits. With the rapid development of the electronic information industry, the requirements for IC integrated circuits are becoming higher and higher, and the line width requirements for circui...

AI Technical Summary

Problems solved by technology

Another type of method is industrial methanol purification and refining of high-purity methanol. There is no patent report for this type of method. The product quality of ultra-pure methanol meets the process requirements of high-end semiconductors.

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