Conductive composition film, electron injection electrode, and organic electroluminescence element
An electroluminescent element and electron injection technology, applied in electroluminescent light sources, electrical components, organic semiconductor devices, etc., can solve the problems of large difference in work function and high driving voltage, and achieve the effect of small work function
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Embodiment 1
[0083] (1) Film formation of conductive composition film
[0084] Prepare a four-inch IZO target (In 2 o 3 : ZnO=89.3:10.7wt% (manufactured by Furuuchi Chemical Co., Ltd.), and filled in a sputtering apparatus. Place 100 In metal wires (φ1mm×10mm) on the target and degas to 2×10 -4 After Pa, at sputtering pressure 0.1Pa, argon 100%, sputtering output 0.1W / cm 2 1. A film was formed on glass under the conditions of a sputtering time of 30 seconds.
[0085] The conductive composition film thus obtained had a film thickness of 10 nm and a specific resistance of 2×10 -3 Ω·cm, the visible light transmittance is 80%.
[0086] In addition, the visible light transmittance was measured with UV-3100 of Shimadzu Corporation.
[0087] In addition, when the work function of this film was measured with AC-1 (Riken Keiki), it was 4.2 eV. In addition, the elemental ratio of In, Zn, and O in the film was measured with a secondary ion mass spectrometer (SIMS), and found to be In:Zn:O=55:1...
Embodiment 2
[0099] (1) Film formation of conductive composition film
[0100] Prepare a four-inch ITO target (In 2 o 3 : SnO=90:10wt% (manufactured by Furuuchi Chemical Co., Ltd.), and filled in a sputtering apparatus. Place 100 Sn metal wires (φ1mm×10mm) on the target and degas to 2×10 -4 After Pa, at sputtering pressure 0.1Pa, argon 100%, sputtering output 0.1W / cm 2 1. A film was formed on glass under the conditions of a sputtering time of 30 seconds.
[0101] The conductive film has a film thickness of 10nm and a specific resistance of 2×10 -3 Ω·cm. When the work function of IZO thus obtained was measured by AC-1 (Riken Keiki), it was 4.1 eV. When the light transmittance was measured, it was 60%. In addition, the ratio of In, Sn, and O was measured by SIMS to be 55:15:30 (atomic %).
[0102] (2) Production of organic EL elements
[0103] An organic EL element was obtained in the same manner as in Example 1, except that an ITO target with 100 Sn metal wires placed in the second...
Embodiment 3~ Embodiment 13
[0107] Except having used the target and metal wire shown in Table 1, it carried out similarly to Example 1 or 2, and formed a film of the electroconductive composition. In addition, an organic EL element was fabricated and evaluated in the same manner as in Example 1 or 2, except that an electron injection electrode layer composed of the conductive composition film was formed. Furthermore, the IO target of Example 13 is a target made of indium oxide.
[0108] Table 1 shows the measurement results of light transmittance, work function of the conductive composition film, current density and luminance of the organic EL device.
[0109] [Table 1]
[0110] target
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