Silicone hydride combustion tower

Abstract

The invention relates to a device for treating inflammable inorganic oxide waste gas by using a burning method, especially relating to a silicone hydride combustion tower comprising a tower body and a water container. A combustion barrel, a material filling chamber, a spray chamber and a liquid-removal chamber are disposed in the tower body. The lower portion of the combustion barrel is disposed in the water container, a ballast cover is provided with the combustion barrel, a spray device is disposed in a hollow cavity between the ballast cover and the combustion barrel. A combustion chamber is disposed at the bottom of the combustion barrel, a voltage equalizing chamber is disposed at the middle portion of the combustion barrel, and a nitrogen protection chamber is disposed at the top ofthe combustion chamber. A slag discharging opening communicating to the outside of the tower body is disposed at the bottom of the combustion chamber. A waste gas inlet and a compressed air inlet aredisposed on the barrel body of the combustion chamber, a solo valve is provided at the waste gas inlet, and maintenance openings are provided at the upper portion of the material filling chamber and on the tower body where the spray chamber exists. The inventive device solves following problems that operation cost of silicone hydride waste gas treatment devices in prior art is high; explosion of silicone hydride waste gas occurs when inflammable gas extinguishes or expires; maintenance of the waste gas treatment device can be performed only when the device is closed down.

Description

technical field [0001] The invention relates to a device for treating waste gas of combustible inorganic oxides by means of an incineration method, in particular to a silane combustion tower. Background technique [0002] When chemical vapor deposition (CVD) techniques are used in the solar cell manufacturing industry and in the manufacture of integrated circuits and electronic components, to prevent pollution and fire, it is necessary to avoid the release of used gases into the atmosphere and / or the production of these processes. gas. Certain gas compounds in these exhaust gases are toxic to humans, are flammable when in contact with air at high temperatures, and can spontaneously burn even when in contact with air or any oxidant at normal temperature. They are mainly silane and ammonia chloride. The traditional equipment for treating silane waste gas mainly adopts the method of burning flammable gas to burn silane. The disadvantage of this method is: high operating cost,...

AI Technical Summary

Problems solved by technology

[0003] The technical problems to be solved by the present invention are: the operation cost of the existing equipment for treating silane waste gas is relatively high; when the flammable gas is extinguished, the gas is cut off, etc., the silane waste gas is prone to explosion hazard; the production equipment must be shut down to treat the waste gas Equipment maintenance and other technical problems, the present invention provides a silane combustion tower, which utilizes the characteristics of silane in contact with air to make silane burn in contact with air in the combustion chamber, low operating cost, safe and reliable, and can be used in production equipment without stopping State overhaul of silane combustion tower

Images