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Micro-cavity gas-sensitive sensor based on simple root metallic oxide nanometer lines field effect tube

A technology of gas sensor and field effect transistor, which is applied in the field of microcavity gas sensor, can solve the problems of high working temperature and slow response speed, and achieve the effect of improving test sensitivity

Inactive Publication Date: 2008-10-22
FUDAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At the same time, there are also many research reports on the use of ZnO (or doped) nanostructures as gas sensors [7-8], but basically they are in the form of thick films, and there are also the above-mentioned high operating temperature and slow response speed. question

Method used

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  • Micro-cavity gas-sensitive sensor based on simple root metallic oxide nanometer lines field effect tube
  • Micro-cavity gas-sensitive sensor based on simple root metallic oxide nanometer lines field effect tube
  • Micro-cavity gas-sensitive sensor based on simple root metallic oxide nanometer lines field effect tube

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Experimental program
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Embodiment Construction

[0022] The present invention is further described below by way of examples.

[0023] 1. Device preparation

[0024] The material of this embodiment uses a single ZnO nanowire as the gas-sensing material, and the oxide layer 7 of the base adopts SiO 2 , The preparation of the device is divided into two steps: the preparation of the gas sensor chip and the packaging of the gas sensor.

[0025] Preparation of gas sensor chip:

[0026] (1) ZnO nanowires 8 (such as figure 1 shown).

[0027] (2) A P+ silicon wafer is used as the substrate 10, and an oxide layer 7 with a thickness of 100-500 nanometers is prepared on the surface thereof.

[0028] (3) The prepared nanowires are dispersed with alcohol and sprinkled on the surface of the substrate.

[0029] (4) Spin-coat a photoresist of 1.5 microns to 3 microns on the substrate, and develop after exposure under the square matrix electrode template.

[0030] (5) Deposit a layer of Au / Ti or Au / Ni electrode with a thickness of 100-2...

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Abstract

The invention belongs to the nano and gas sensor technical field, in particular relating to a microcavity gas sensor for a field effect tube. The sensor adopts the design of a gas-sensitive chip based on a single metallic oxide nano wire in a microcavity, wherein, nano-wire materials can be ZnO, SnO2, TiO2 or In2O and so on. The gas sensor has high sensitivity, quick response speed, and low power consumption, does not need external heating, can utilize grid voltage to modulate the sensitivity and the selectivity, is convenient for being combined with other disconnecting gears for selective detection, and can be used for detection of gas such as O2, NO2, CO, H2, formaldehyde, alcohol and so on.

Description

technical field [0001] The invention belongs to the technical field of nanometer and gas sensitive sensors, and in particular relates to a microcavity gas sensitive sensor of a field effect tube. Background technique [0002] It is well known that detecting O 2 and toxic and flammable gases such as NO 2 , CO, H 2 Gas sensors such as , formaldehyde and alcohol gas are widely used in daily life, industrial production, biology and medical treatment, environmental protection, anti-terrorism and disaster prevention, military defense and many other aspects. Common materials used are ZnO[1], SnO 2 [2],In 2 o 3 [3] ... and their adulterants, etc. However, whether it is already commercial or research literature, most of the materials involved are bulk materials, thin films or thick films (including thick films composed of nanostructures). The gas cavity when they work is relatively large (mostly tens or even hundreds of cubic centimeters), which greatly affects their response ...

Claims

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Application Information

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IPC IPC(8): G01N27/414
Inventor 陈国荣郑凯波孙大林
Owner FUDAN UNIV
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