Double-frequency magnetic response negative magnetoconductivity metal compound structure material and production method thereof

Abstract

A dual frequency magnetic response negative magnetic conductivity metal composite structure material is composed of a first metal composite structure group or a second metal composite structure group which is arranged on a substrate according to a cycle T or by interlacing a plurality of groups, wherein, the metal composite structure group comprises an L-shaped cantilever, a metal strip, a supporting arm and an air layer or a dielectric layer; the manufacturing method of the dual frequency magnetic response negative magnetic conductivity metal composite structure material comprises the following steps: (1) the metal strip is manufactured by a micro machining technique; (2) targeted evaporation is carried out by using a step shadowing method to manufacture a sacrificial layer or the dielectric layer; (3) the L-shaped cantilever and the supporting arm are manufactured by using the same targeted evaporation; (4) finally the sacrificial layer is removed by using wet etching or a plasma incineration technique. The material of the invention not only realizes the visible light and near-infrared band dual frequency magnetic response negative magnetic conductivity, but also has big enough characteristic size; therefore, the manufacturing of the material can be realized by using the 30 nano to 100 nano micro machining technique.

Description

Dual-frequency magnetic response negative permeability metal composite structure material and manufacturing method thereof Technical field The invention relates to a dual-frequency magnetic response negative permeability metal composite structure material and a manufacturing method thereof, and belongs to the technical field of metal composite structure materials. Background technique In nature, except for a few magnetic materials that do not have the limit of effective permeability (hereinafter referred to as permeability) μeff=1, there is no other material that can break through this limit. Since Veselago proposed negative magnetic Since the concept of permeability, pendry uses the split ring artificial metal composite structure to obtain the modulation of the magnetic permeability in the microwave band, and realizes the negative permeability. Subsequently, this metal structure based on the LC resonance coupling theory has been used to achieve terahertz (THz) or higher, as w...

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Problems solved by technology

In order to achieve the magnetic response in the visible light band, people want to use the split-ring structure to achieve the magnetic response in the visible light band. Because the characteristic size of the local capacitance needs to be reduced to less than 10nm, it is technically very difficult in terms of current processing technology. Difficult to achieve

Another method is to use the antisymmetric mode plasmon resonance coupling of adjacent metal structures to the parallel polarization electric field. Based on this method, it also requires a small feature size, and there are technical difficulties that cannot be realized. At the same time, they are all single-band Magnetic response, dual-band magnetic response not implemented

In order to overcome the above-mentioned problems of small characteristic size and single-band magnetic response, and realize the magnetic response of visible light and infrared multi-band at the same time, a new artificial metal composite structure material is proposed, the characteristic size is relatively large, and it can also realize Dual-frequency magnetic response negative permeability in visible and near-infrared bands

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