Double-frequency magnetic response negative magnetoconductivity metal compound structure material and production method thereof

Abstract

A dual frequency magnetic response negative magnetic conductivity metal composite structure material is composed of a first metal composite structure group or a second metal composite structure group which is arranged on a substrate according to a cycle T or by interlacing a plurality of groups, wherein, the metal composite structure group comprises an L-shaped cantilever, a metal strip, a supporting arm and an air layer or a dielectric layer; the manufacturing method of the dual frequency magnetic response negative magnetic conductivity metal composite structure material comprises the following steps: (1) the metal strip is manufactured by a micro machining technique; (2) targeted evaporation is carried out by using a step shadowing method to manufacture a sacrificial layer or the dielectric layer; (3) the L-shaped cantilever and the supporting arm are manufactured by using the same targeted evaporation; (4) finally the sacrificial layer is removed by using wet etching or a plasma incineration technique. The material of the invention not only realizes the visible light and near-infrared band dual frequency magnetic response negative magnetic conductivity, but also has big enough characteristic size; therefore, the manufacturing of the material can be realized by using the 30 nano to 100 nano micro machining technique.

Description

technical field [0001] The invention relates to a dual-frequency magnetic response negative magnetic permeability metal composite structural material and a manufacturing method thereof, belonging to the technical field of metal composite structural materials. Background technique [0002] In nature, except for a few kinds of magnetic materials, there is no effective permeability (hereinafter referred to as permeability) μ eff = 1 limit, there is no other material that can break through this limit. Since Veselago proposed the concept of negative magnetic permeability, pendry has obtained the modulation of the microwave band magnetic permeability by using the artificial metal composite structure of the split ring to realize negative magnetic permeability. Subsequently, this metal structure based on LC resonance coupling theory was used to achieve magnetic response above terahertz (THz) and in the infrared band, and to achieve negative magnetic permeability. In order to achie...

AI Technical Summary

Problems solved by technology

In order to achieve the magnetic response in the visible light band, people want to use the split-ring structure to achieve the magnetic response in the visible light band. Because the characteristic size of the local capacitance needs to be reduced to less than 10nm, it is technically very difficult in terms of current processing technology. Difficult to achieve

Another method is to use the antisymmetric mode plasmon resonance coupling of adjacent metal structures to the parallel polarization electric field. Based on this method, it also requires a small feature size, and there are technical difficulties that cannot be realized. At the same time, they are all single-band Magnetic response, dual-band magnetic response not implemented

In order to overcome the above-mentioned problems of small characteristic size and single-band magnetic response, and realize the magnetic response of visible light and infrared multi-band at the same time, a new artificial metal composite structure material is proposed, the characteristic size is relatively large, and it can also realize Dual-frequency magnetic response negative permeability in visible and near-infrared bands

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