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Method for preparing charcoal/charcoal air supply nozzle of high temperature furnace

A technology of air inlet nozzles and high-temperature furnaces, which is applied in chemical instruments and methods, crystal growth, silicon halide compounds, etc. It can solve the problems of nozzles affecting the continuous operation time of hydrogenation furnaces, pollution of high-purity polysilicon products, and reducing the service life of nozzles. Achieve the effects of increasing continuous running time, improving thermal shock resistance and structural stability, and increasing strength

Active Publication Date: 2008-11-26
XIAN CHAOMA SCI TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, high-purity graphite is mainly used in the intake nozzles of polysilicon hydrogenation furnaces. Due to the low strength of graphite materials and weak erosion resistance, the graphite nozzles are not only easy to fall off surface particles under the erosion of air flow, but also produce high-purity polysilicon products. Pollution, and easy to break, greatly reducing the service life of the nozzle, and the continuous operation time of the hydrogenation furnace is more than 2000 hours, so the service life of the nozzle will seriously affect the continuous operation time of the hydrogenation furnace

Method used

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  • Method for preparing charcoal/charcoal air supply nozzle of high temperature furnace
  • Method for preparing charcoal/charcoal air supply nozzle of high temperature furnace

Examples

Experimental program
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Effect test

Embodiment 1

[0030] (1) Use 12K plain weave carbon cloth and short carbon fiber mesh tires to be laminated alternately, and introduce vertical reinforcement fibers in the thickness direction by acupuncture technology to make a full carbon fiber quasi-three-way structure prefabricated body. The density of the prefabricated body is 0.45g / cm 3 ;

[0031] (2) Chemical vapor infiltration densification treatment: using propylene as a raw material to crack at high temperature, and performing chemical vapor infiltration densification treatment on the preform in step (1); the high temperature temperature is 940°C;

[0032] (3) Furfurone resin impregnation-carbonization: Under the pressure of 2.0MPa, the prefabricated body after the chemical vapor infiltration densification treatment in step (2) was impregnated for 3.5 hours in the impregnation tank, and then transferred to the curing furnace after leaving the tank. Curing treatment, the curing temperature is 190°C, and then transferred to the car...

Embodiment 2

[0040] (1) 6K plain carbon cloth and short carbon fiber mesh tires are alternately laminated, and vertical reinforcing fibers are introduced in the thickness direction by acupuncture to make a quasi-three-dimensional structure prefabricated body of carbon fiber. The density of the prefabricated body is 0.55g / cm 3 ;

[0041] (2) Chemical vapor infiltration densification treatment: using propylene as a raw material to crack at high temperature, and performing chemical vapor infiltration densification treatment on the preform in step (1); the high temperature temperature is 980°C;

[0042] (3) Phenolic resin impregnation-carbonization: Under the pressure of 1.5MPa, impregnate the preform after the chemical vapor infiltration densification treatment in step (2) for 4.5 hours in the impregnation tank, and transfer it to the curing furnace for curing after leaving the tank Treatment, the curing temperature is 190°C, and then transferred to the carbonization furnace for carbonizati...

Embodiment 3

[0050] (1) Use 3K plain weave carbon cloth and short carbon fiber mesh tires to be alternately laminated, and introduce vertical reinforcement fibers in the thickness direction using acupuncture technology to make a full carbon fiber quasi-three-way structure prefabricated body. The density of the prefabricated body is 0.40g / cm 3 ;

[0051] (2) Chemical vapor infiltration densification treatment: using natural gas as raw material to crack at high temperature, and performing chemical vapor infiltration densification treatment on the preform in step (1); the high temperature temperature is 1060°C;

[0052] (3) Furfurone resin impregnation-carbonization: Under the pressure of 2.0MPa, the prefabricated body after the chemical vapor infiltration densification treatment in step (2) was impregnated for 4 hours in the impregnation tank, and then transferred to the curing furnace after leaving the tank. Curing treatment, the curing temperature is 190°C, and then transferred to the ca...

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Abstract

The invention relates to a preparation method for carbon / a carbon nozzle of air supple used in a high temperature furnace, which adopts a needling plain carbon cloth prefabricated body with a pseudo-three-dimensional structure; the prefabricated body is densified by chemical gas-phase permeation and resin impregnation-charing for a plurality of times; the densified blank carries out high-temperature treatment at a certain temperature to increase opening percentage on the surface, and then densification treatment is further carried out; the resin impregnation-charing densification technique is adopted until the density is equal to or more than 1.75g / cm<3>, finally mechanical workout is carried out after high-temperature purification treatment, and the surface is treated with CVD coating to produce the carbon / the carbon nozzle of air supple. The method of the invention adopts the technique of the combination of chemical gas-phase permeation and resin impregnation-charing for densification to produce the material of the carbon / the carbon nozzle; when being applied to the nozzle of air supple in a polysilicon hydrogenation furnace, the material of the carbon / the carbon nozzle can effectively enhance the strength of the nozzle of air supple and scour resistance and corrosion resistance of the nozzle, prolong the service life of the nozzle and lower the replacing rate of the nozzle.

Description

technical field [0001] The invention belongs to the technical field of intake nozzle materials for polysilicon hydrogenation furnaces, and in particular relates to a method for preparing a carbon / carbon intake nozzle for high-temperature furnaces. Background technique [0002] At present, the main method of producing polysilicon is the modified Siemens method, and the polysilicon produced by the modified Siemens method accounts for more than 80% of the world's total polysilicon production. When the improved Siemens method is used to produce polysilicon products, the hydrogenation furnace is a step in the recycling system, that is, the recovery of reaction products, which will generate SiCl, a by-product of the reaction of polysilicon products. 4 with H 2 The reaction produces SiHCl 3 Raw materials are reused. In a hydrogenation furnace, at 1250°C, SiCl 4 with H 2 The mixed gas enters the furnace from the nozzle at a speed of 30m / s to react, and the pressure in the furna...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/83C04B35/52C01B33/107C01B33/03C30B28/14C30B29/06
Inventor 李永军肖志超侯卫权谢乔彭志刚苏君明孟凡才
Owner XIAN CHAOMA SCI TECH
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