Yttrium-iron-garnet film structure and preparation method

Abstract

The invention relates to an yttrium iron garnet film structure which belongs to the field of electronic material, in particularly to a method for preparing radio frequency magnetron sputtering of yttrium iron garnet film materials. The film structure consists of a Si substrate and an yttrium iron garnet film layer, wherein a CeO2 transient layer is also arranged between the Si substrate and the yttrium iron garnet film layer. The yttrium iron garnet film structure has the advantages that: surface of the film is improved greatly, surface roughness is reduced obviously, saturation magnetization and remnant magnetization of the film is improved, and coercive force is reduced.

Description

technical field [0001] The invention belongs to the field of electronic materials, and particularly relates to a radio frequency magnetron sputtering preparation method of yttrium iron garnet thin film material. Background technique [0002] Garnet thin films are considered to be a promising material in high-performance nonreciprocal waveguide devices, integrated magneto-optical devices, and microwave devices due to their excellent Faraday rotation optical effect and low transmission loss. At the same time, Si plays an important role in integrated circuits, and the research and preparation of thin films based on Si has become very popular, because it may realize the integration of Si-based microelectronic devices and optical waveguides. There have been many literatures on the preparation of garnet on Si substrates, and the garnet films on Si substrates are not like those prepared on other substrates, such as quartz, GGG, Al 2 o 3 Substrates, etc., are easily crystallized c...

AI Technical Summary

Problems solved by technology

There have been many literatures on the preparation of garnet on Si substrates, and the garnet films on Si substrates are not like those prepared on other substrates, such as quartz, GGG, Al 2 o 3 Substrates, etc., are easy to be completely crystallized, so there is a big gap between their magnetic properties and magneto-optical properties.

Images