Capacitor type horizontal shaft micro-mechanical tuning fork gyroscope

Abstract

The invention relates to a capacitance horizontal axis micro-mechanical tuning fork gyroscope which is characterized by including an underlay, anchor points, a detection folding beam, a framework, a drive folding beam, a detection quality block, a drive comb capacitance and a detection comb capacitance; the drive comb capacitance and the detection comb capacitance respectively include a movable electrode and a fixing electrode; the anchor points, the detection folding beam, the framework, the detection quality block, the drive comb capacitance and the detection comb capacitance are symmetrically arranged relative to the X-axis and the Y-axis of the gyroscope; the movable electrode of the drive comb capacitance is fixedly connected with the detection quality block; the detection quality block is connected with the framework by the drive folding beam; the movable electrode of the detection comb capacitance is connected with the framework; the framework is connected with the anchor points by the detection folding beam; the anchor points are fixedly connected with the underlay; the fixing electrode of the drive comb capacitance and the fixing electrode of the detection comb capacitance are fixedly connected with the underlay by the anchor points of each own. The capacitance horizontal axis micro-mechanical tuning fork gyroscope has a simple technical process, can be compatible with a Z-axis tuning fork gyroscope, can be used for realizing a chip triaxial gyroscope and can realize batch production.

Description

technical field [0001] The invention relates to a micromechanical gyroscope, in particular to a capacitive horizontal axis micromechanical tuning fork gyroscope. Background technique [0002] Micromechanical gyroscopes have the advantages of small size, light weight, low cost, low power consumption, and easy integration. They have urgent application requirements and broad application prospects in the fields of aviation, aerospace, weapons, automobiles, and consumer electronics. [0003] At present, the single proof-mass gyroscope is the most widely studied and relatively mature form of micromechanical vibrating gyroscope. Except for the vibrating wheel gyroscope, this structural form has the problem of being sensitive to linear acceleration in principle. The following measures are available to solve this problem: 1. Two single-axis gyroscopes are installed in reverse to form a single-axis gyroscope through pairing; 2. Compensation is made by measuring linear acceleration; 3....

AI Technical Summary

Problems solved by technology

However, these solutions also have the following disadvantages: 1. Measure 1 will increase production costs, reduce production efficiency and yield, and the increase in the number of devices will also increase the cost of use and reduce system reliability; 2. Measure 2 will greatly reduce the gyroscope. range and linearity; 3. Measure 3. Micromechanical vibrating gyro technology using closed-loop detection is relatively difficult, and has not yet been reported.

However, these measures have the following disadvantages: 1. Measure 1 greatly increases the requirements for packaging, thus increasing the cost and reducing production efficiency; 2. Measure 2 reduces the mass of the proof mass to reduce the sensitivity and resolution of the gyro

However, the use of straight beams has the following disadvantages: 1. It is impossible to release the stress generated by the micromechanical gyroscope during the processing, which affects the stability of the gyroscope performance; 2. It is impossible to release the stress generated by the temperature change and temperature gradient during the gyroscope’s working process.

This approach increases the requirements for experimental equipment, prolongs the production cycle, and increases production costs; for problem 2, this problem can be solved by performing constant temperature control on the gyroscope, but the temperature control increases the complexity and volume of the system and increases power consumption

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