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Method for manufacturing microlens array by soft mode impressing

A technology of microlens array and soft mold embossing, which is applied in the field of microlens array, can solve the problems that photoresist patterns cannot be completely transferred, product uniformity is difficult to guarantee, and the production process is complicated, so as to achieve good optical performance, low cost, and easy manufacturing short cycle effect

Inactive Publication Date: 2009-01-07
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

The disadvantage of this method is that the etching rate of the substrate material and the photoresist must be precisely controlled, the process is difficult to control, and because the etching rate of the photoresist and the substrate material is different, the photoresist pattern cannot be completely transferred to the substrate. to go
[0008] The various microlens array manufacturing methods described above are more suitable for small-batch production of microlenses, but if microlens arrays need to be produced in large quantities, the above methods are not very convenient, and the cost is high, and the overall production process is complicated. Uniformity is difficult to guarantee

Method used

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Embodiment Construction

[0028] The present invention will be further described below in conjunction with embodiment. To fabricate microlens arrays by soft mold imprinting, the first step is to fabricate a mother microlens array by hot-melting photoresist. First, evenly coat a layer of photoresist (shipay1818, or shiplay1805, etc.) on a clean glass substrate by spin coating; then obtain a cylindrical microstructure on the substrate through exposure and development; The substrate is heated at 130° C. for 10 minutes, the substrate is removed, and the mother microlens array can be obtained after cooling.

[0029] The second step is to transfer the pattern of the microlens array to the UV adhesive by embossing. First, make a silicone rubber mold: We use polydimethylsiloxane (PDMS, Sylgard184, Dow Coring) to make the mold, first mix the main agent and curing agent in a weight ratio of 10:1, and stir well , if bubbles are generated, vacuum defoaming treatment is required. The time of vacuum defoaming depe...

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Abstract

The invention discloses a method for manufacturing microlens array by soft mode imprinting, wherein, master microlens array is manufactured by utilizing a traditional photoresist hot melting method, poly-dimethyl-siloxane is taken as a microlens die, and the graph of the microlens array is transformed to a uv gel on a glass substrate by utilizing an imprinting method. The method of the invention has the advantages of simple process, low cost, and being capable of mass production.

Description

technical field [0001] The invention relates to a microlens array, in particular to a method for manufacturing a microlens array by soft mold embossing. Background technique [0002] Microlens array is a kind of micro-optical element that is widely used at present. It is an array composed of a series of tiny lenses with apertures ranging from a few microns to hundreds of microns. It is widely used in beam shaping and optical device interaction. Lian, optical information processing, 3D imaging and other fields. [0003] At present, the methods used to fabricate microlens arrays mainly include photoresist hot-melt method, photosensitive glass method, ion exchange method, and reactive ion etching method. [0004] The photoresist hot-melt method is to use photoresist as the material, use photolithography and corrosion to make the material into cylinders, and then use baking and heating to dissolve it, rely on surface tension, and finally cool it down. Microlenses that become s...

Claims

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Application Information

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IPC IPC(8): G03F7/00G02B3/00
Inventor 周常河王伟
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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