Micro-fluid pump with active control capability

Abstract

The invention discloses a micro-pump provided with active control capability. A microfluid active control valve with toroidal boundary is adopted to compose a liquid inlet valve and a liquid outlet valve; an electrically controllable film actuating element is adopted to cover an open face of a cylindrical counterbore of a pump body so as to compose a pump cavity which is connected with a cylindrical (cylindrical center hole) liquid cavity of the microfluid valve; the cylindrical center hole (toroidal) liquid cavity of the microfluid valve is respectively connected with a liquid inlet and a liquid outlet. The frequency, amplitude value and phase relation of a controlling signal (a periodic signal and a positive signal) acting on the microfluid valve and the film actuating element of the pump are changed to control the flow, pulse and outputting pressure of the micro-pump. When a driving signal does not exist, the film actuating element and toroidal boundary of the microfluid valve have precompressing force, thus being in commonly closed state. The micro-pump with active and precise controlling capacity of the invention is a bilaterally controllable micro-pump with active and precise control capacity.

Description

technical field [0001] The invention belongs to the technical field of microfluid machinery, and relates to a microfluid pump with active control capability. Background technique [0002] With the rapid development of micromechanical and electronic science, in chemical analysis and detection, drug release, bioengineering, integrated circuit chips, micro components, miniaturized production systems (micro factories) and lab-on-chip (Lab-on-Chip), etc. In the field of microfluidics, there is an urgent need for microfluidic delivery devices that deliver small flows and high precision. Among all microfluidic components and systems, microvalve and micropump are not only the core components, but also the earliest researched microfluidic components. The earliest scientific paper on micropump research was published in 1978. After more than 20 years of development, some commercial products have been supplied to the market. Due to the diversity of micropump research work, there are m...

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Problems solved by technology

The main disadvantages of valved piezoelectric pumps using passive valves: ①The structure is usually complicated, and there are certain difficulties in processing technology and integration; ②Piezoelectric pumps that use mechanical reversing valves to achieve unidirectional fluid flow are small and fragile The wear and fatigue damage of the mechanical valve are insurmountable problems; ③ Since the amplitude of the piezoelectric vibrator of the piezoelectric pump is very small, the volume change of a vibration reciprocation is also very small, so the pump flow generated by a vibration reciprocation is also very small ; ④ easy to block; ⑤ relative to the pump flow, the leakage of the impact valve must be small (nl min -1 ); ⑥ In order to increase the pump flow rate, the only way to increase the vibration frequency of the piezoelectric vibrator is to use a mechanical reversing valve, and the pump flow rate will suddenly decrease after the frequency is increased

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