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Sub- and micro- Newton level force measuring system

A measurement system, a micro-newton technology, is applied to the components of the TV system, the measurement of the property force of the piezoelectric device, and the TV, etc., to achieve the effect of small range, high sensitivity and reliable method.

Inactive Publication Date: 2009-02-25
SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

[0003] In order to solve the problem of sub-micro-Newton contact force measurement in the micro-assembly process, the purpose of the present invention is to provide a sub-micro-Newton force measurement system

Method used

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  • Sub- and micro- Newton level force measuring system
  • Sub- and micro- Newton level force measuring system
  • Sub- and micro- Newton level force measuring system

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Embodiment Construction

[0021] The sub-micro-Newton force measurement system of the present invention is composed of a micro-force sensing measuring head, a signal conditioning circuit (Conditioning Circuit) and a data acquisition module installed in a computer, wherein the micro-force sensing measuring head receives the micro-action force from the probe and converts the force signal into The charge is then sent to the signal conditioning circuit, which converts it into a suitable voltage that can be detected. The data acquisition module converts the obtained voltage signal through A / D conversion, and uses the relationship between the calibrated micro force and the output voltage of the signal conditioning circuit to convert the voltage value into the micro force value received during operation.

[0022] 1. The micro-force sensing measuring head adopts a micro-force sensing measuring head based on PVDF piezoelectric material, and this micro-force sensing measuring head adopts a simple and practical ca...

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Abstract

The invention relates to a technology for measuring micro Newton force based on a PVDF piezoelectric material, particularly a system for measuring submicro Newton force which comprises a micro force perception measuring head, a signal disposal circuit and a data acquisition module, wherein the micro force perception measuring head receives micro force from a probe, converts a force signal to electric charge and then sends the electric charge to the signal disposal circuit; the signal disposal circuit converts the electric charge into a sizable and detectable pressure signal and sends the pressure signal to the data acquisition module; the data acquisition module conducts A / D convert of the received pressure signal and converts a pressure value into a micro force value by using the relationship between the calibrated micro force and the output pressure of the signal disposal circuit. The technology solves the problem of measuring submicro Newton contact force during the micro assembling process, and is mainly used in the technical fields of micro / nano machining, assembling, etc.

Description

technical field [0001] The invention relates to a micro-Newton force measurement technology based on a PVDF (Polyvinylidene fluoride, polyvinylidene fluoride) piezoelectric material. Specifically, it is a measurement system for sub-micro-Newton force, which is mainly used in technical fields such as micro-nano scale processing and assembly. technical background [0002] Micro-nano manipulation is an emerging research direction in the field of robotics / automation. It provides new processing and manufacturing control and experimental research methods for the fields of physics, chemistry, biology, mechanism and micro-electromechanical systems, and advanced manufacturing. Studies have shown that with the miniaturization of the operation scale, the operation tools and processing objects are becoming more and more miniaturized, and any small force change will cause large changes in the state of tools and objects. Therefore, position / force feedback under traditional macroscopic con...

Claims

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Application Information

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IPC IPC(8): G01L1/16B81B7/02
Inventor 于鹏董再励缪磊王越超刘连庆刘意杨王光宏
Owner SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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