Amorphous silicon thin-film solar cell laser etching system and etching method

Abstract

The invention discloses a laser scribing system for amorphous silicon thin-film solar cells, and a scribing method, which relates to the field of laser processing. The scribing system comprises a first scribing device, a second scribing device and a control cabinet for controlling the first and second scribing devices. The scribing method comprises the steps of scribing a first datum line and a second datum line at a preset interval on a conducting layer of conductive glass, plating the conducting layer with an amorphous silicon layer after scribing is over, detecting the tracks of the first datum line and the second datum line respectively, scribing a first scribing line and a second scribing line which are parallel to the first datum line and the second datum line respectively on the amorphous silicon layer, plating the amorphous silicon layer with an aluminum layer after scribing is over, detecting the tracks of the first datum line and the second datum line respectively, and scribing a third scribing line and a fourth scribing line which are parallel to the first datum line and the second datum line respectively on the amorphous silicon layer and the aluminum layer. The scribing system and the scribing method can meet technological requirements and are high in scribing precision.

Description

【Technical field】 [0001] The invention relates to the technical field of laser processing, in particular to a laser scribing system and a scribing method for an amorphous silicon thin film solar cell. 【Background technique】 [0002] With the rapid development of modern industry, the rapid upgrading of technology and the demand for energy, the energy structure is undergoing fundamental changes. The traditional energy: coal, oil, and natural gas consumption will reach its peak in 2020-2040 , and will gradually dry up after 2050, alternative energy, renewable energy (mainly solar energy) has developed rapidly since 2000, and its usage will reach its peak by 2050. Traditional solar cells use monocrystalline silicon or polycrystalline silicon thin slices, which use a lot of silicon materials, resulting in serious waste, and the silicon element purification process is complicated and costly. Amorphous silicon thin-film solar cells use a small amount of silicon, so there is no raw...

AI Technical Summary

Problems solved by technology

In the existing technology, it is difficult to achieve such process requirements by using traditional mechanical methods or chemical solvent etching, and the chemical solvent etching method needs to increase sewage treatment equipment, which occupies a large area of ​​the factory building, has high costs, pollutes the environment, and is not environmentally friendly.

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