Apparatus for preparing CVD diamond film for linear sample
A technology for sample preparation and diamond film, applied in metal material coating process, gaseous chemical plating, coating and other directions, can solve problems such as low utilization rate of mixed gas, inability to generate uniform high-quality diamond film, etc., and achieve convenient replacement. , the effect of improving utilization and increasing growth rate
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[0037] Example 1:
[0038] Such as figure 1 , figure 2 As shown, the device includes a gas collector 2, a base support frame 4, a displacement adjuster 5, and a vacuum equipment external transmission device, wherein the vacuum equipment external transmission device is composed of a stepping motor 6, a reduction box 7, a belt 8. The vacuum rotary valve 9 and the transmission soft shaft 10 are composed. The gas collector 2 is a device made of stainless steel by bending and welding with a narrow slit vent cavity inside. The base support frame 4 is made of Mo, W, Ti or their alloys with high temperature resistance and small deformation coefficient. The displacement adjuster can precisely adjust the horizontal and vertical positions of the linear substrate. The external transmission device of the vacuum equipment is powered from outside the cavity, and the power is transmitted to the vacuum reaction chamber through the vacuum rotary valve 9, and the linear base 3 is driven to rotate t...
Example Embodiment
[0042] Example 2: Such as image 3 As shown, the gas inlet device 16 and the gas collector 2 adopt the structure when they are arranged horizontally. In the figure, the gas inlet device 16 and the gas collector 2 both adopt a horizontally arranged device with a narrow slotted vent chamber to form a gas flow field. The stratosphere evenly passes through a plurality of linear substrates 3 parallel to the stratosphere, so that the reactive gas beams are concentrated in a smaller area. The gas inlet device 16 and the gas collector 2 should be far away from the fixed and movable support frame to reduce the turbulence of the air flow field caused by the support frame blocking the air flow direction and the rotation of the gear. After the external transmission system of the vacuum chamber transmits power to the room, it connects the transmission flexible shaft 10 and drives the driving gear and the shaft 19 to rotate, so that the driven gear set 14 meshing with each other drives the line...
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